Authors: K.P. Scherer, H. Eggert, H. Guth, I. Sieber and P. Stiller
Affilation: Forschungszentrum Karlsruhe, Germany
Pages: 680 - 683
Keywords: microstructures, FEM, structure analysis, heat generation, structural behavior
At the Institute of Microstructures in the Research Center of Karlsruhe (FZK) optical devices are developed in micro-structure technologies . Because of the miniaturized dimensions of the optical components, a very high accuracy must be guaranteed by the fabrication process. Furthermore, the exactly fabricated measures must be kept during the real application process. The knowledge about the qualitative and quantitative deformations, resulting from the real surrounding parameters (pressure, heat loads) in the application is essential. The question is, are the expected deformations large enough to make device malfunctioning, or are they small enough, to keep the desired functionality within the given tolerances. These informations concerning the deformed device solids can and have to be generated by numerical simulations before the very expensive fabrication process. The results of the simulations influence the design and the construction of the optical devices.
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