Authors: M. Huja and M. Husak
Affilation: Czech Technical University in Prague, CS
Pages: 672 - 675
Keywords: micromirror, modeling, electrostatic, microsystems, optical
The main objective of the research described is to design optimal principle of micromirror array and its manufacturing technology with maximum penentration of the reflected/non-reflected part of micromirror array using standard, easily available and cheap technologies. ANSYS program was used for simulation of mechanical properties of designed structures. Mechanical properties of torsion springs were modelled using formulas for torsion description of silicon structure. We calculated the electrostatic force between the top (micromirror) and botton electrodes and tried to find the compromise for the best size of micromirror, the biggest deflection angle of micromirror, and voltage between electrodes. The electrostatic micromirror was fabricated using the Multi-User MEMS Processes. The electrostatically actuated micromirror was constructed using thin surface of micromachined polysilicon film on a silicon wafer.