MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Applications: Micropumps, Heaters and Coolers Chapter 15

Numerical Simulation of Pulse-Width-Modulated Micropumps with Diffuser/Nozzle Elements

Authors: N-T. Nguyen and X. Huang

Affilation: Nanyang Technological University, Singapore

Pages: 636 - 639

Keywords: microfluidics, micro pump, pulse width modulation, computational fluid dynamics

This paper presents the numerical simulation of a new control method for dynamic micropumps with diffuser/nozzle elements: the pulse-width-modulation (PWM) of the drive signal. A piezo disk with a square wave signal actuates the pump, the square-wave-like deflection of the membrane causes velocity pulses in opposite directions. Because of the inertia of the fluid in the pump chamber, the time distance between these velocity pulses controls the generated flow rate. The paper compares results of models with different boundary conditions of the pump membrane: time-dependent velocity and time-dependent deflection. This paper also describes the fabrication of pump prototype based on laser micromachining. Simulation results are then compared to experimental results.

ISBN: 0-9666135-7-0
Pages: 741