MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Applications: Micropumps, Heaters and Coolers Chapter 15

Dynamic Analysis of an Electrostatic Micropump

Authors: T.Y. Jiang, T.Y. Ng and K.Y. Lam

Affilation: National University of Singapore, Singapore

Pages: 632 - 635

Keywords: micropump, electrostatic force, electro mechanical coupling, three dimensional boundary element method, dynamic analysis, assumed-mode method

In this paper, a micropump actuated by electrostatic force is dynamically analysed. Mathematical model is established to evaluate the dynamic response of the micropump. Electro-mechanical coupling effect is considered in evaluating the electrostatic force applied on the pump electrode. Boundary Element Method is employed to solve the three dimensional Laplace equation that the potential difference satisfies. A combination of Assumed-mode method and Boundary Element Method is employed to solve the governing equation of the pump diaphragm. Newmark iteration method is utilized to solve the decoupled ordinary differential equations. Deflection of the oscillated diaphragm is demonstrated to evaluate the performance of the electrostatic pump. Amplitude and frequency of the potential difference between the two electrodes are investigated.

ISBN: 0-9666135-7-0
Pages: 741