MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Applications: MEMS, Sensors Chapter 14

On Design of a Backplate Used in a Hearing Aid

Authors: N.L. Pedersen

Affilation: Technical University of Denmark, Denmark

Pages: 624 - 627

Keywords: topology optimization, prestress, SIMP, Eigen-frequency, MEMS design

In this work topology optimization is used to optimize the compliance or the eigenfrequencies of prestressed plates. The prestress is accounted for by including the force equivalent to the prestressing and adding the initial stress stiffness matrix to the original stiffness matrix. The calculation of the sensitivities is complicated because of the initial stress stiffness matrix, but the computational cost can be kept low by using the adjoint method. The topology optimization problem is solved using the SIMP method (Simplified Isotropic Material with Penalization) in combination with MMA (Method of Moving Asymptotes). Numerical examples of minimizing compliance or maximizing the first eigenfrequency of plates are given. The example is a MEMS (Micro Electro Mechanical Systems) application involving a back-plate used in a microphone for a hearing aid.

ISBN: 0-9666135-7-0
Pages: 741