MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Applications: MEMS, Sensors Chapter 14

Optimal Design of A Tuning Fork Gyroscope and Its Testing Experiment

Authors: Y. Dong, F.E.H. Tay, Y. Wen, X. Yuan and W.T. Chen

Affilation: National University of Singapore, Singapore

Pages: 621 - 623

Keywords: optimization, gyroscope, eigenfrequency, testing

The eigenfrequency of a MEMS Tuning Fork Gyroscope (TFG) is calculated using a formula derived from Rayleigh method. From this formula, the objective function for the optimal design is established. Then two methods to solve the objective function are introduced. The TFG has also been fabricated using SOI technologies based on the optimum design. Driving testing results show good agreement between the calculated and the experimental eigenfrequencies.

ISBN: 0-9666135-7-0
Pages: 741