MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Applications: MEMS, Sensors Chapter 14

Effects of Surface Properties on the Effective Electrical Gap of Microelectromechanical Devices Operating in Contact
E.K. Chan and R.W. Dutton
Stanford University, US

Modeling and Control of Nanomirrors for EUV Maskless Lithography
Y. Chen, Y. Shroff and W.G. Oldham
University of California, US

Simulation for Low Temperature Coefficient Design of Piezoresistive and Hall Sensors
K. Matsuda and Y. Kanda
Naruto University of Education, JP

The Effect of Thermal Boundary Conditions and Scaling on Electro-Thermal-Compliant Micro Devices
N. Mankame and G.K. Ananthasuresh
University of Pennsylvania, US

Analysis of Anodic Bonding and Packaging Effects in Micro Sensors
T-K. Shing
Industrial Technology Research Institute, TW

Design of Piezoresistive Silicon Cantilevers with Stress Concentration Regions (SCR) for Scanning Probe Microscopy (SPM) Applications
A. Gupta, R. Bashir, G.W. Neudeck and M. McElfresh
Purdue University, US

Optimal Design of A Tuning Fork Gyroscope and Its Testing Experiment
Y. Dong, F.E.H. Tay, Y. Wen, X. Yuan and W.T. Chen
National University of Singapore, SG

On Design of a Backplate Used in a Hearing Aid
N.L. Pedersen
Technical University of Denmark, DK

Design and Simulation of A Novel Highly Symmetrical Piezoelectric Triaxial Accelerometer
G. Li, Z. Li, C. Wang, Y. Hao, T. Li and G. Wu
Peking University, CN

ISBN: 0-9666135-7-0
Pages: 741