MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Applications: Microfluidics Chapter 13

Hierarchical Simulation for Microelectrofluidic System Performance Analysis

Authors: T. Zhang and A. Dewey

Affilation: Duke University, United States

Pages: 553 - 557

Keywords: microelectro fluidic systems, MEFS, hierarchical modeling and simulation, micro chemical analysis system, finite element method, FEM, performance analysis

With the sophisticated development of microelectro fluiidic devices and systems, system performance analysis is a key for system optimization and system re-design. Due to the increasing complexity and natural characteristics of microsystems, system performance is intensly related to low-level component design and operation features. This paper presents a hierarchical modeling and simulation method for a micro chemical analysis system. Relationships between overall microsystem capacity and constitutive component performance are analyzed. The objective is to understand quantitatively how variations in device properties in uence system throughput and utilization. Such information is useful for system architectural design and manufacturing yield optimization.

ISBN: 0-9666135-7-0
Pages: 741