MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Applications: Microfluidics Chapter 13

A Comparison of the Behavioral Characteristics of Miniature Gas Flow Sensors

Authors: P. Cousseau, O. Dubochet, Ph. Lerch and Ph. Renaud

Affilation: Swiss Federal Institute of Technology, Switzerland

Pages: 594 - 597

Keywords: thermal gas flow sensor, plastic

This paper presents a comparison of three different designs for a miniature gas flow sensor operating on the thermal transfer principle, the standard silicon nitride membrane device and two plastic designs. The goal of this work is to determine the performance change when the conventional thin silicon nitride membrane is replaced with a thicker but less thermally conductive plastic substrate. The finite element method was used to determine the thermal behavior of the three different designs. Results comparing the temperature difference between the up and down stream sensing wires as a function of flow rate are presented.

ISBN: 0-9666135-7-0
Pages: 741

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