MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Numerics, Algorithms Chapter 11

Nonlinear Analysis of Electrostatic Actuation in MEMS with Arbitrary Geometry

Authors: S. Taschini, H. Baltes and J.G. Korvink

Affilation: ETH-Hoenggerberg, Switzerland

Pages: 485 - 488

Keywords: nonlinear analysis, electrostatic actuationa, MEMS

We present an explicit formulation for the Jacobian (or tan-gent) matrix of the discretized non-linear model for a cou-pled electromechanical system. The Jacobian matrix, consisting of the derivatives of the residual, is needed in Newton-Raphson-based algorithms to solve these non-linear problems, as well as in the analysis of their stability. Our for-mulation of the Jacobian matrix relies on the discretization of the electrostatic sub-model by means of the collocation boundary-element method. It is independent of the discreti-zation method (either boundary or finite elements) and of possible non-linearities in the mechanical sub-model.

ISBN: 0-9666135-7-0
Pages: 741

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