MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Numerics, Algorithms Chapter 11

A Novel Approach for Determining Pull-In Voltages in Micro-electro-mechanical Systems (MEMS)

Authors: D.S. Long, M.A. Shannon and N.R. Aluru

Affilation: University of Illinois at Urbana-Champaign, United States

Pages: 481 - 484

Keywords: MEMS, Lagrange multiplier method, pull-in voltage, two-dimensional electrostatic analysis

In this paper we introduce a novel method, based on the Lagrange Multiplier Method (LMM), for calculating pull-in voltages in MEMS. This method combines the finite-element with a displacement constraint and boundary element method. The sign of the lagrange multiplier will be the criterion used to identify when the conductors come into contact. The validity of this numerical approach is demonstrated by two simple examples along with comparison to previously published data.

ISBN: 0-9666135-7-0
Pages: 741