Authors: D.S. Long, M.A. Shannon and N.R. Aluru
Affilation: University of Illinois at Urbana-Champaign, United States
Pages: 481 - 484
Keywords: MEMS, Lagrange multiplier method, pull-in voltage, two-dimensional electrostatic analysis
In this paper we introduce a novel method, based on the Lagrange Multiplier Method (LMM), for calculating pull-in voltages in MEMS. This method combines the finite-element with a displacement constraint and boundary element method. The sign of the lagrange multiplier will be the criterion used to identify when the conductors come into contact. The validity of this numerical approach is demonstrated by two simple examples along with comparison to previously published data.