Authors: R.E. Rudd
Affilation: University of Oxford, United Kingdom
Pages: 465 - 468
Keywords: MEMS, silicon resonators, coupling of length scales, finite elements, molecular dynamics
We describe developments in the coupling of length scales methodology which allows the simulation of the dynamic and temperature dependent behavior of sub-micron Micro-Electro-Mechanical Systems (MEMS). This novel technique accurately models the behavior of the mechanical components of MEMS down to the atomic scale, by combining the power of an atomistic simulation with the e?ciency of finite elements. The codes have been written using scalable algorithms suitable for parallel supercomputers. In this paper we discuss the general issues involved in this type of multiscale simulation, with a particular emphasis on the behavior of finite elements when the mesh spacing is refined to the atomic scale and methods for generating such a mesh. We also describe some results from simulations of the vibrational behavior of sub-micron silicon and quartz oscillators.