MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Numerics, Algorithms Chapter 11

Finite Element Based Electrostatic-Structural Coupled Analysis with Automated Mesh Morphing

Authors: V.I. Zhulin, S.J. Owen and D.F. Ostergaard

Affilation: ANSYS, Inc., United States

Pages: 501 - 504

Keywords: finite element, electrostatic-structural, coupled analysis, automatic mesh morphing

A co-simulation tool based on finite element principles has been developed to solve coupled electrostatic-structural problems. An automated mesh morphing algorithm has been employed to update the field mesh after structural deformation. The co-simulation tool has been successfully applied to the hysteric behavior of a MEMS switch.

ISBN: 0-9666135-7-0
Pages: 741