Index of Keywords


Micromachined Thermal Multimorph Actuators Fabricated by Bulk-etched MUMPs Process

Micromachined Piezoresistive Tactile Sensor Array Fabricated by Bulk-etched MUMPs Process

A Nanoscale Composite Material for Enhanced Damage Tolerance in MEMS Applications

Novel Monolithic Micro Droplet Generator

Device Characterization at the Wafer Level via Optical Actuation and Detection

System Issues in Arrays of Autonomous Intelligent Sensors

Smart, Intelligent and Cogent Microsensors - Intelligence for Sensors and Sensors for Intelligence

Micro Actuator Array based on Ionic Polymer with Patterned Self-Assembled Au Electrode

Inverse RIE Lag of Silicon Deep Etching

Feature Length-Scale Modeling of LPCVD and PECVD MEMS Fabrication Processes

Using Topology Derived Masks to Facilitate 3D Design

New Accurate 3-D Finite Element Technology for Solving Geometrically Complex Coupled-Field Problems

Computational Prototyping of an RF MEMS Switch using Chatoyant

Effective Modelling and Simulation of Over-Heated Actuators

Displacement Detection using Quantum Mechanical Electron Tunneling in Micro and Nano-electro-mechanical Systems

Sol-Gel Prepared Single Wall Carbon Nanotube SnO2 Thin Film for Micromachined Gas Sensor

Realizing Complex Microsystems: A Deterministic Parallel Assembly Approach

UV Laser Micro-Materials Processing Of MEMS, Microfluidics, Sensors, LEDs and Other Miniature Devices

Modular Design Approaches for MicroFluidic Systems

Design, Modelling and Simulation of a PZN-PT Actuated Micropump