Index of Keywords


Nano-bending Method to Identify the Residual Stresses of MEMS Films

Diamond Materials for MEMS and NEMS Structures and Devices

Adaption of the 3w-Method for Testing of MEMS

A Fluoro-ethoxysilane-Based Stiction-Free Release Process for Submicron Gap MEMS

Parallel Plate Plasma Etching for MEMS Processing-Reactor Modelling

RF-MEMS Voltage Tunable Capacitor using Electrostatic Forces

MEMS Technologies for Communications

Magnetic Diffusion in Nonlinear Micro-Media: A Modified Finite-Difference Time-Domain Approach

Tilt-angle Stabilization of Electrostatically Actuated Micromechanical Mirrors

Very Large Scale Integration of MOEMS Mirrors, MEMS Angular Amplifiers and High-voltage, High-density IC Electronics for Photonic Switching

Superharmonic Resonance of an Electrically Actuated Resonant Microsensor

Dynamic Simulation of MEMS Switches using Simulink

A Systematic Approach to Macromodeling Complex MEMS Devices

System Model for MEMS based Laser Ultrasonic Receiver

Krylov-Subspace-Based Order Reduction Methods Applied to Generate Compact Thermo-Electric Models for MEMS

A Novel Simulation Methodology for Isotropic Gas Phase Etching

MEMS Fabrication Modeling with ChISELS: A Massively Parallel 3-D Level-Set Based Feature Scale Modeler

PEM Fuel Cells

MEMS Biofluidic Device Concept Based on a Supramolecular Motor

A MEMS Tunable Inductor