Index of Keywords


Modeling and Simulation for MEMS Design, Industrial Requirements

Nonlinear Analytical Reduced-Order Models for MEMS

Static Equivalent Circuit Model for a Capacitive MEMS RF Switch

Actuation for Probe-Based Mass Data Storage

Optimal Design of a MEMS Relay Switch

Modeling Sub-Continuum Effects on the Mechanical Properties of Ultrathin Macromolecular Layers

Capillary Interaction Between a Small Thin Solid Plate and a Liquid

Development and Performance of a PVM Based Parallel Geometric Modeler for MEMS

Thermal Stability Evaluation of MEMS Microactuator for Hard Disk Drive

Simulation and Realization of Free Space Optical Switch Architecture Based on MEMS Vertical Mirrors

Analysis of the Nonlinear Behavior of a MEMS Variable Capacitor

Modeling and Simulation of Silicon Microsystem of Chemical Signals

Polysilicon Prototypes for Flip-bonded Hybrid MEM-tunable Filters and VCSELs

Structural Analysis of a Magnetically Actuated Silicon Nitride Micro-Shutter for Space Applications

Modeling of a Self-Retracting Fully-Compliant Bistable Micromechanism

Simulation and Modeling of a Micro Pressure Sensor Array

RF Measurement Techniques for Micro-Cantilever Characterization and Application

Residual Stress Characterization in MEMS Microbridges using Micro-Raman Spectroscopy

Development of a MEMS Vertical Planar Coil Inductor

Triangle Transducer for Micro Electro Mechanical Systems (MEMS) Simulation in ANSYS Finite Element Program