Index of Keywords

MEMS modeling

A Method for Solving Arbitrary MEMS Perforation Problems with Edge and Rare Gas Effects

Application of a Design Methodology Using a 2D Micro Scanner


NEMS Mass Sensor by Focused Ion Beam Fabrication

MEMS packaging

Lead Frame Package of MEMS Devices using Wafer-level, Air-gap Structures

MEMS parallel plate capacitor

Integration of memristors with MEMS in different circuit configurations

MEMS physical design

Web-Based Design Tools for MEMS-Process Configuration

MEMS power

Operation and Testing of a Micro Heat Engine

MEMS Power

Analysis of Micromachined PZT Membranes for MEMS Power

MEMS pressure sensor

Towards Wireless Implantable Pressure Sensor to Monitor Compartment Syndrome in Trauma Victims

MEMS process

Microcap Selective Packaging through Flip Chip Alignment

MEMS processing

Modeling 3-D Fluid Flow for a MEMS Laminar Proportional Amplifier

MEMS product engineering

Methodology and tool support for micro- and nano product engineering for SMEs

MEMS reliability

Numerical Fracture Analysis of MEMS Devices

Statistical Optimal Design of Microelectromechanical Systems (MEMS)

Neural Network-Based MEMS Failure Probability Prediction

MEMS resonator

Coupled Substrate-resonator-electrostatic Simulation and Validation fo High-Q MEMS Resonator Performance

Design and Manufacturing of a Miniaturized 2.45GHz Bulk Acoustic Filter by High Aspect Ratio Etching Process

MEMS resonators

Characterization of Microscale Material Behavior with MEMS Resonators

MEMS sensors

3-axis Capacitive Low-Gravity MEMS Accelerometer with Zero Cross-Axis Sensitivity in a Commercial Process

MEMS silicon microphone

The Design, Fabrication and Characterization of A Novel Miniature Silicon Microphone Diaphragm