Index of Keywords

MEMS accelerometer

Fetal Movement Detection Based on MEMS Accelerometer

Experimental analysis of the MEMS Capacitive accelerometer’s shock resistibility

MEMS actuators

Preparation of functional PZT films on 6” and 8” silicon wafers by high rate sputtering

MEMS beam

Nanolayer Interconnect Structures Ageing by Beam Resonance Method


Top Down Design of MEMS

mems compound grating

Optimization of Diffractive MEMS for Optical Switching

MEMS control

Nonlocal Problems in MEMS Device Control

MEMS data model

A Data Model for the Representation of Fabrication Dependencies Concerning Micromechanical Devices

MEMS dc-dc converter

Design and Control of a Zero Voltage Switching MEMS DC-DC Power Converter

MEMS design

Microelectromechanical Systems (MEMS) Design and Design Automation Research Projects at Duke University

On Design of a Backplate Used in a Hearing Aid

Modelling and Optimization of Medical Test Strips Made From Plastics

mems design

A New, Topology Driven Method for Automatic Mask Generation from Three-Dimensional Models

Algorithmic and Modeling Aspects in the Electro-thermal Simulation of Thermally Operated Microsystems

MEMS design

Finite Element Validation of an Inverse Approach to the Design of an Electrostatic Actuator

Three Degrees of Freedom Thermal Microactuator

MEMS design and test cycle

SUGARX: A Online Tool That Bridges the Gap Between Experiment and Simulation

MEMS design methodology

Top Down Design of MEMS

MEMS devices

Numerical Simulation of Micro Assembly Techniques in MEMS Devices

An Online Electrostatics Modeling Tool for Microdevices with Dirichlet Boundary Conditions by Schwarz-Christoffel Mapping