Index of Keywords

electron beam

Computer Simulation from Electron Beam Lithography to Optical Lithography

Application of Encapsulated PECVED-grown Carbon Nano-Structure Field-Emission Devices in Nanolithography

Nanoscale Reaction Analysis of Resist Materials for Nanolithography

High-density Optical Disk Mastering Using Electron Beam Lithography with Modified LIGA Demolding Mechanism

A field-emission X-ray source using an anisotropically focused electron beam

Chip Scale Focussed Electron Beam Induced Etching of a Silicon Nitride Membrane with Unique Beam Writing Strategies

electron beam irradiation

Monte Carlo simulations of 1keV to 100keV electron trajectories from vacuum through solids into air and resulting current density and energy profiles

Stimuli-responsive nanogels by e-beam irradiation of dilute aqueous micellar solutions: Nanogels with pH controlled LCST

electron beam lithgraphy

Enhancement of Silicon Photon Emission with Nanostructure Array

electron beam lithography

Fabrication of Nanometer-Sized Structures by C-NEMS Technology

Growth of Individual Vertically Aligned Nanotubes/Nanofibers with Small Diameter by PECVD on Different Metal Underlayers

Nanowire formation for Single Electron Transistor using SEM Based Electron Beam Lithography (EBL) Technique: Positive Tone Vs Negative Tone E-beam Resist

Nanogaps for fabrication of Molecular Devices

Fabrication of Bowtie Nano-Gap Structures by Electron Beam Lithography

Ink-jet printed ZnO Nanoparticle Thin Films for Sensing Applications

Fabrication and Recording of Bit Patterned Media Prepared by Rotary Stage Electron Beam Lithography

Fabrication and Characterization of of Nanoscale Tellurium Fuses for Long Term Solid State Data Storage

Patterning of Periodic Structures Using Continuously Moving Stage

electron beam processing

Control of solid surface properties by electron beam processing

electron beam resist

Characterization of an ultra high aspect ratio electron beam resist for nano-lithography