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Nano Science and Technology Institute 1999 NSTI Nanotechnology Conference & Trade Show
Nanotech 99
Index of Authors
99 Sub Sections
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Nanotech Proceedings
Nanotechnology Proceedings
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Nanotech 99 Technical Program - Tuesday April 20

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Keynote lectures

Salons II & III
Session chair: Andreas Wild, Motorola
8:30 Virtual Component Qualification
Michael G. Pecht, P. Sandborn, and P. McCluskey
University of Maryland, USA


Condado Foyer

Special Session: Computational Extraction of Compact Model Parameters for ULSI and MEMS

Salon III
Session chair: Jan G. Korvink, Freiburg University, Germany
9:30 Acceleration of Inductance Extraction by Means of the Monte Carlo Method
G. Leonhardt and W. Fichtner
9:50 Accurate Inductance Extraction with Permeable Materials Using Qualocation
Y. Massoud, J. Wang and J. White
10:10 Reduced-Order Modeling of Lorentz Force Actuation with Modal Basis Functions
M. Varghese, V.L. Rabinovich, and S.D Senturia
Massachusetts Institute of Technology, USA
10:30 Capacitance Extraction from Complex 3D Interconnect Structures
D. Cartwright, G. Csanak, D. George, R. Walker, A. Kuprat, A. Dengi and W. Grobman
Los Alamos National Laboratory, USA
10:50 A Technique for Extraction of Macro-Models in System Level Simulation of Inertial Electro-Mechanical Micro-Systems
M.H. Zaman, S.F. Bart, V.L. Rabinovich, C.K. Ghaddar, I. Tchertkov and J.R. Gilbert
Microcosm Technologies, Inc., USA
11:10 A Wide Frequency Range Surface Integral Formulation for 3-D Inductance and Resistance Extraction
J. Wang, J. Tausch and J. White
11:30 Simple ADPL Implementation of a 3D FEM Simulator for Mutual Capacitances of Arbitrarily Shaped Objects Like Interconnects
A. Hieke
Siemens Microelectronics, USA
11:50 Extraction of Compact-Model Parameters for ULSI MOSFETs Using a Genetic Algorithm
J. Watts, C. Bittner, D. Heaberlin, and J. Hoffman
IBM Microelectronics Division, USA

Special Session: Front-End

Salon II
Session chair: Mike Masquelier, Motorola
9:30 Linking of Atomistic Modeling to Macroscopic Behavior for Front End Processes
S.T. Dunham (invited)
Boston University, USA
10:00 Modeling and Simulation of Non-Linear Damage Growth During Ion Implants in Silicon
M-S. Son, H-J. Hwang
Chung-Ang University, KOREA
10:20 Accurate Three-Dimensional Simulation of Damage Caused by Ion Implantation
A. Hossinger and S. Selberherr
10:40 Ab-Initio TCAD Models of Dopant Diffusion in Silicon
J.S. Nelson, A.F. Wright and P.A. Schultz
Sandia National Laboratory, USA
11:00 Ab-Initio Pseudopotential Calculations of Boron Diffusion in Silicon
W. Windl, R. Stumpf, M. Masquelier, M. Bunea and S.T. Dunham
Motorola, USA
11:20 Experimental Verification of Process Models
M. Law
University of Florida, USA

Computational Initiatives in Biotechnology

Atlantic View 1 & 2
Session chair: Dirk Bussiere, Abbott Laboratories
9:40 Structural genomics and automatic methods for macromolecular X-ray structure determination
Thomas Terwilliger
10:25 To be announced
David M. Lorber
Northwestern University, Chicago, IL
11:10 Structure-based design of protein function
Homme W. Hellinga
Duke , USA



Computational Initiatives in Biotechnology

Atlantic View 1 & 2
Session chair: Dirk Bussiere, Abbott Laboratories
15:00 Global Description of Amino Acid & Nucleotide Sequences: Application to Predicting Protein Folds, Intron-Exon Discrimination, & RNA Gene Identification
I. Dubchak, S.R. Holbrook, and I. Muchnik
Lawrence Berkeley National Laboratory, USA
13:20 3D Protein Databases Integrated with Genomic and Chemical Data
Mary Donlan
14:10 Reconstructing Gene Regulatory Networks from Gene Expression Data
Frank Tobin
SmithKline Beecham , USA

Equivalent Circuits, Behavioral and Multilevel Simulation

Salon III
Session chair: Bart Romanowicz, Microcosm Technologies, Inc.
13:20 Compact Large-Displacement Model for Capacitive Accelerometer
T. Veijola, H. Kuisma, J. Lahdenpera
Helsinki University of Technology, FINLAND
13:40 Partial-Element Equivalent-Circuit-Model Simulation for Designing RF-Wireless Communication Products with Embedded Passive Components
W.R. Smith
National Semiconductor Corp., USA
14:00 BSIM3 and Spice Level 3 Flicker Noise Characterization for Monolithic Integrated CMOS-Microelectomechanical Systems (MEMS)
B.D. Staple, H.A. Watts, J.J. Everts, .J. Huber, F.W. Hewlett, and J.H. Smith
Sandia National Laboratory, USA
14:20 Visual Modeling and Design of Microelectromechanical System (MEMS) Transducers
A. Dewey and E. Icoz
Duke Univeristy, USA
14:40 Coupled Package-Device Modeling for MEMS
S.F. Bart, V. Rabinovich, S. Zhang, V.L. Rabinovich, and S. Cunningham
Microcosm Technologies, Inc., USA
15:00 Optimized Behavioral Model of a Pressure Sensor Including the Touch-Down Effect
D. Peters, S. Bechtold and R. Laur
University of Bremen, GERMANY
15:20 High-Fidelity and Behavioral Simulation of Air Damping in MEMS
M. Turowski, Z. Chen and A. Prezekwas
CFD Research Corp., USA

Special Session: Quantum Devices

Salon II
Session chair: Dragica Vasileska, Arizona State University
13:20 Nonstationary Space Charge Limited Ballistic Current of Quantized Holes
A.N. Korshak, Z.S. Gribnikov, and V.V. Mitin
Wayne State University, USA
13:40 Complex Potentials, Dissipative Processes and General Quantum Transport
D.K. Ferry, J.R. Barker and R. Akis
Arizona StateUniversity, USA
14:00 Simulation Study of ZnTe-CdZnTe Based Asymmentric Step Strained Layer Quantum Well Infrared Photo-Detectors
P.R. Vaya and R. Srinivasan
14:20 Theory of Electron Transport in Small Semiconductor Devices Using the Pauli Master Equation
M.V. Fischetti
IBM Research Corp., USA
14:40 Full-Band Cellular Automata for Modeling Transport in Sub-Micrometer Devices
M. Saraniti, S. Wigger and S.M. Goodnick
Illinois Institute of Technology, USA
15:00 An Overview of the 3D Simulation Efforts at Arizona State University Directed Towards Understanding Transport in the Quantum Dots and the Ultra-Small Devices of the Future
R. Akis, D. Vaileska, and D.K. Ferry
Arizona State University, USA
15:20 Modeling On-Currents for n-MOSFETs: Ultimate Limits vs. the NTRS
F. Assad, Z. Ren, D. Vasileska, S. Datta and M.S. Lundstrom
Purdue University, USA


Condado Foyer

Poster Session (A)

Condado Foyer

Process Modeling

Condado Foyer
A Program for Modeling of Technological Routes of VLSI Fabrication - ""ProMIC-T
V. Tesluk and O. Korbetskyy
Lviv Polytechnic, UKRAINE
Simulation Support for Silicon-Bulk Microsystems Demonstrated on a Inclination Sensor Development
D. Zielke
Laser Induced Surface Modification of Ceramic Substrates for Thermal and Electric Lines in Microsystems: Modeling Compared to Experiment
H. Gruhn, R. Heidinger, M. Rohde, S. Ruedinger, J. Schneider and K.H. Zum Gahr
University of Karlsruhe, GERMANY
Nitrous Oxide-Based Progressive Silicon Oxynitridation in Furnaces of Different Dimensions
S.S. Dang and C.G. Takoudis
University of Illinois - Chicago, USA
Mask-Layout Synthesis Through an Evolutionary Algorithm
H. Li and E.K. Antonsson
California Institute of Technology, USA
Surface Reconstruction of Etched Contours
C-Y. Lee and E.K. Antonsson
California Institute of Technology, USA
A Novel Method to Utilize Existing TCAD Tools to Build Accurate Geometry Required for MEMS Simulation
N.M. Wilson, S. Liang, P. Pinsky, and R.W. Dutton
Stanford University, USA
Design of Compensation Structures for Anisotropic Etching
M.K. Long, J.W. Burdick and E.K. Antonsson
California Institute of Technology, USA

Computational Materials

Condado Foyer
Development of Periodical Spatial Distribution of Donor States in Heat-Treated Silicon
P. Selishchev
Kyev University, UKRAINE
Computer Molecular Dynamics and Phase Transition in Alkali Azides and Thiocyanates
M.M. Ossowski and J.R. Hardy
University of Nebraska, USA
Surface Morphology and Chemically Active Sites on Ru Based Ultracapacitors: Montecarlo Simulation with Embedded Atom Potentials
L. Blum, M. Legault, F.R. Zypman
University of Puerto Rico, USA
High-Field and High-Temperature Transport in n-Type 3C-SiC
Y. Zhang and Y. Zhang
Xidian University, CHINA
Modeling of Oxynitride-Si System Based on Reflected Spectra
K.J. Plucinski, F. Lhomme and I.V. Kityk
Military University of Technology, POLAND
A Robust Algorithm for Predicting Freezeout and Exhaustion Under Equilibrium Conditions
R. Pieper and S. Michael
Naval Postgraduate School,

Yeild and Reliability

Condado Foyer
A Simple VLSI Spherical Particle-Induced Yield Predictor
K.Nakamae, H. Omori and H. Fujioka
Osaka University, JAPAN
Thermo-Mechanical Simulation of Wire Bonding Joints in Power Modules
S. Ramminger, G. Mitic, P. Turkes and G. Wachutka
Strength Prediction for MEMS Components Transferring Large Loads
L-H. Chu, Q.Chen and G.P. Carman
Numerical Fracture Analysis of MEMS Devices
N. Tayebi and A.K. Tayebi
Case Western Reserve University, USA
Rapid Reliability Assessment Using CADMP-II
F.P. McCluskey and M. Pecht
University of Maryland, USA
Inductive Fault Analysis of a Microresonator
T. Jiang, C. Kellon and R.D. Blanton
Carnegie Mellon University, USA

Characterization, Parameter Extraction, Calibration

Condado Foyer
Numerical and Analytical Modeling of the Piezoelectric Transformer and Experimental Verification
S. Hallaert, E. Sarraute, and B. Le Pioufle
Laboratorire d'Electricite Signaux et Robotique, FRANCE
SPDC: An Automatic Generator of Input Data for Process Simulators from Process Flow Data for Manufacturing
T. Tatsumi, H. Ansai, M. Mukai and Y. Komatsu
Sony Corp., JAPAN
IMAP: Interferometry for Material Property Measurement in MEMS
B.D. Jensen, M.P. de Boer and S.L. Miller
Sandia National Laboratory, USA
MEMS/MST Model Verification and Materials Parameter Extraction Using MEMSPEC-2000
A. Gutierrez, S. Aceto M. Simkulet, D. Patti, M. Liendhard, T. Krawczyk and A. Lundgren
InterScience, Inc, USA

Numerics, Algorithims

Condado Foyer
Optimum Algorithm for Electronic System Design
A. Zemliak
Puebla Autonomous University, MEXICO
Analysis of Unstable Behavior Occurring in Electro-Mechanical Microdevices
E.-R. Konig and G. Wachutka
Munich University of Technology, GERMANY
Optimal Time Stepping in the Thermo-Mechanical Finite Element Simulation of IGBTs Modules
Y. Tronel and W. Fichtner

Software Tools, CAD Systems

Condado Foyer
Modeling of Stress Induced Hysteresis in Pieso-Resistive Analysis
SUNRED: A Field Solver and Compact Model Generator Tool Based on Successive Node Reduction
V. Szekely, A. Pahi, M. Rosenthal and M. Rencz
Techical Unviersity of Budapest, HUNGARY
Web-Based Design Tools for MEMS-Process Configuration
K. Hahn and R. Bruck
University of Siegen, GERMANY
CAD Analyses of PCR Well Containment
M. Deshpande, K.B. Greiner, B. Romanowicz, and J.R. Gilbert
Microcosm Technologies, Inc., USA

Equivalent Circuits, Behavioral and Multilevel Simulation

Condado Foyer
A Neural Network Approach for the Identification of Micromachined Accelerometers
E. Gaura, N. Steele and R.J. Rider
Coventry University, UNITED KINGDOM
Modeling A Piezo-Electric Actuator Using A Transformer Equivalent Circuit
F. Oms-Elisabelar, C. Bergaud, L. Nicu, and A. Martinez
Circuit Simulation of Quantum Well Bistable Laser Diodes
M.G. Madhan, P.R. Vaya, and N. Gunasekaran
Anna University, INDIA
Relaxation-Based Circuit Simulation for Large Scale Circuits with Lossy Transmission Lines
C-J. Chen
Chinese Culture University, TAIWAN
A Model of Photoelectric Phenomena in MOS Structures at Low Electric Fields
H.M. Przewlocki
Institute of Electron Technology, POLAND
Analytical Modeling of Beam Behavior Under Different Actuations
E. Sarraute and I. Dufour
Electro-Mechanical Transducer for MEMS Analysis in ANSYS
M. Gyimesi and D. Ostergaard
A Methodology for System Level Simulation, Modeling and Optimization of MEMS Devices
L. Nguyen, H.J. Lee, M.A. Maher and H. von Sosen
Tanner Research, Inc., USA
Model Based Identification as a New Tool to Extract Physical Parameters of Microactuators from Measurements with Error Bounds
C. Rembe, E.P. Hofer and B. Tibken
University of Ulm, GERMANY
Parameterized Electrostatic Gap Model for Structured Design of Microelectroelectrical Systems
M.S. Lu and G.K. Fedder
Carnegie Mellon University, USA
A Compact Model for an IC Lateral Diffused MOSFET Using the Lumped-Charge Methodology
Y. Subramanian, P.O. Lauritzen and K.R. Green
Texas Instruments, USA
Compact Modeling of Bistable Electrostatic Actuators
J. Xu, R.B. Darling and P.O. Lauritzen
University of Washington, USA


Condado Foyer

Poster Session (B)

Condado Foyer

Semiconductor Device Modeling

Condado Foyer
Structure Optimization of 140 GHz Pulsed-Mode IMPATT Diode
A. Zemliak, C. Celaya and R. Garcia
Puebla Autonomous University, MEXICO
Implementation of Strain Induced Effects in Sensor Device Simulation
K. Matsuda and Y. Kanda
Naruto University of Education, JAPAN
Self Aligned Gate JFET's for Smart MEMS
S. Amon, D. Vrtacnik, D. Resnik, D. Krizaj, U. Aljancic, A. Levstek
University of Ljubljana, SLOVENIA
Measuring and Characterizing Sub-Micron Short Channel LDD MOSFETs
P.C. Liu and H. Lin
Nanyang Technological University, SINGAPORE
Modelling High Built-In Electric Field Effects on Generation-Recombination Rates in Space-Charge Regions of pn a-Si:H Junctions
J. Furlan, Z. Gorup, F. Smole and M. Topic
University of Ljublijana, SLOVENIA
Computer Simulation of Silicon Carbide Devices Using ATLAS
M. Tarplee, V. Madangarli, Q. Zhang, I. Khlebnikov, T.S. Sudarshan
University of South Carolina, USA
An Analytical Field Effect Mobility Model of N- and P-Channel Poly-Si TFTs
J. Kung
National Lienho College of Technology and Commerce, TAIWAN

Applications: Pressure, Actuation, Navigation

Condado Foyer
Simulation and Optimization of Variable Capacitance (VC) Micromotors, Using Modified Parallel-Plate Model
A.W.A. Salman, A.Napieralski and G. Jablonski
Technical University of Lodz, POLAND
Joule Heating Simulation of Poly-Silicon Thermal Micro-Actuators
D. J. Silversmtih and J.R. Reid
Wayne State University, USA
Fluctuating Amplitudes of Micro-Cantilever Vibration Modes
A. Greiner, M. Fischer and J.G. Korvink
Albert Ludwigs Universitat Frieburg, GERMANY
Modeling and Design Optimization of a CMOS Compatible MEMS
L. Latorre, Y. Bertrand, P. Hazard, F. Pressecq and P. Nouet
Simulation of Nonideal Behaviour in Integrated Piezoresistive Silicon Pressure Sensors
W. Romes, J. Muchow, S. Finkbeiner, J. Franz, O. Schatz, and H-P. Trah
Robert Bosch GmbH , Germany
Analytical Simulation of a 1D Single Crystal Silicon Electrostatic Micromirror
H. Camon, F. Larnaudie, F. Rivoirard, and B. Jammes
Analytical Modeling of Cross-Axis Coupling in Micromechanical Springs
S. Iyer, Y. Zhou, and T. Mukherjee
Carnegie Mellon University, USA
Modeling Approach for CVD-Diamond Based Mechanical Structures
P. Schmid, M. Adamschik, S. Ertl, P. Gluche and E. Kohn
University of Ulm, GERMANY
A New Analytical Solution for Diaphragm Deflection and its Application to a Surface-Micromachined Pressure Sensor
W.P. Eaton, F. Bitsie, J.H. Smith, D.W. Plummer
Sandia National Laboratory, USA
Modeling of SiC Lateral Resonant Devices Over a Broad Temperature Range
R.G. DeAnna, S. Roy, C.A. Zorman, and M. Mehregany
US Army Research Laboratory, USA
MEMS Microactuators from Active Materials
K. Bhattacharya
California Institute of Technology, USA
3-D Finite Element Modeling Schemes for Design and Simulation of VR Microactuator
A. Mohamed and M. El-Hagry
Electronics Research Institute, EGYPT

Applications: Electromagnetics, Optics, Imaging

Condado Foyer
Simulation of a Micro Optical Distance Sensor Realized by the LIGA Process
H. Guth, A. Hellmann, I. Sieber, H. Eggert, J. Mohr, H. Nakajima, K. Tanimot and T. Usami.
Forschungszentrum Karlsruhe, GERMANY
Wavelet Transform Image Compression Prototype
L. Watkins, K.R. Perry, J.S. Hurley, B. Olson, B. Pain
Clark Atlanta Univeristy, USA
Rectilinear Dynamics of Magnetically Driven Microsystems
M.I. Kilani, C.J. Chen, Y. Haik and V. Pai
Florida A&M University - Florida State University, USA
System-Level Optical Models of 3-D Laser Projection Systems Using Micromirror Arrays
J.Albrecht, R. Seidel, L. Melzer and D. Muller
Chemnitz University of Technology, GERMANY
Physically Rigorous Modeling of Sensing Techniques Exploiting the Thermo-Optical and Electro-Optical Effect
R. Thalhammer, F. Hille, P. Scheubert, and G. Wachutka
Munich University of Technology, GERMANY
CAD for Opto-Electronic Microsystems
T.P. Kurzweg, S.P. Levitan, P.J. Marchand, K.R. Prough and D.M. Chiarulli
University of Pittsburgh, USA
Simulation of Diffusive Light Exposure of LTCC Tapes and the Selection of an Optimal Grain Size Distribution
P. Espinoza-Vallejos, L. Sola-Laguna and J.J. Santiago-Aviles
University of Pennsylvania, USA
A Linear Regression Scheme for Vision Systems
F. Reyes and M. Orato
University of Puebla, MEXICO

Applications: Microfluidics - 1

Condado Foyer
Numerical Simulation of Boiling in a Porous Medium by Using Two-Phase Approach
C. Bourbon and V. Milisic
Non-Isothermal Gas Flow Through Rectangular Microchannels
F. Sharipov
Universidade Federal do Parana, BRAZIL
Coupled Fluid-Thermal-Structural Simulations in Microvalves and Microchannels
M.M. Athavale, H.Q. Yang and A.J. Przekwas
CFD Research Corp., USA
Simulation of Micro-Channel Heat Sinks for Optoelectronic Microsystems
E.W. Kreutz, N. Pirch, T. Ebert, R. Wester, B. Ollier, P. Loosen, R. Poprawe
Lehrstuhl fur Lasertechnik, GERMANY
Characterization of DNA Flow through Microchannels
P.J. Shrewsbury, S.J. Muller, D. Liepmann
University of California-Berkeley, USA
The Valveless Diffuser Pump-A Numerical Design Study Using MATLAB
A. Olsson, G. Stemme and E. Stemme
Royal Institute of Technology, SWEDEN
Numerical Simulations of Flat-Walled Diffuser Elements for Valveless Micropumps
A. Olsson, G. Stemme and E. Stemme
Royal Institute of Technology, SWEDEN

Applications: Micropumps, Heaters and Coolers

Condado Foyer
Development of CAD Model for MEMS Micropumps
M. Arik, S.M. Zurn, A. Bar-Cohen, Y. Nam, D. Markus, and D. Polla
Univeristy of Minnesota, USA
Investigation of Interaction Between Subparts in Human Hemoglobin Using Concept of Conjugated Ion-Hydrogen Bonds Systems and Its Application to Biosensors Development Problem
V.V.Luchinin, E.L. Demchenko, and V.A. Karasev
St. Petersburg State Electrotechnical University, RUSSIA
Nanosecond Range Heating and Temperature Measurement on Thin Layers Experiment and Simulation
W. Moritz, U. Roth, M. Heyde, K. Radermann, M. Reichling and J. Hartmann
Humboldt Universitat zu Berlin, GERMANY
Evaluating Adhesion Strength of Biological Molecules to Nanofabricated Structures
R.K. Soong, S.J. Stelick, G.D. Bachand, and C.D. Montemangno
Cornell University, USA
Finite Element Modeling of a Microhotplate for Microfluidic Applications
R.P. Manginell, D.A. Rosato, D.A. Benson and G.C. Frye-Mason
Sandia National Laboratory, USA

Banquet Dinner

Grand Ballroom
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