NSTI Nanotech 2009

MEMS Fab: Design, Manufacture, Instrumentation

Symposium Sessions


Monday May 4

8:00 Keynotes: Nanotech & Cleantech & TechConnect
10:30 NanoFab: Fundamentals - self assembly, synthesis, and patterning
10:30 MEMS: InkJet Architectures
10:30 MEMS & Wireless: Environment & Society Applications
1:30 NanoFab: SPL METHODS - Bottom up assembly
1:30 MEMS: InkJet Drop Formation
1:30 MEMS & Wireless: Increasing Human Safety
4:00 NanoFab: Tools and Instrumentation Showcase - 1
4:00 MEMS: InkJet Applications
4:00 MEMS & Wireless: Power

Tuesday May 5

8:00 Keynotes: Nanotech & Cleantech & TechConnect
11:00 MEMS: Computational Methods, Simulation & Software Tools
10:30 NanoFab: Alternative Top-down Fabrication Modes
10:30 MEMS & NEMS: Sensors & Systems: Invited Lectures
1:30 NanoFab: Integration & Nanodevices
1:30 MEMS & NEMS: Novel Materials, Processes & Devices
 NanoFab: Novel Materials, Structures & Processes

Wednesday May 6

8:00 Keynotes: Nanotech & Cleantech & TechConnect
8:30 Keynote Panel: The Future of Energy
10:30 NanoFab: DPN Applications
10:30 Micro & Nano Fluidics - Transport Phenomena
 NanoFab: Novel Materials, Structures & Processes
 MEMS & NEMS: Novel Materials & Processess
3:30 NanoFab: Tools and Instrumentation Showcase - 2
3:30 MEMS & NEMS: Molecular & Gas Sensors
3:30 Micro & Nano Fluidics - Applications

Thursday May 7


Symposium Program


Monday May 4

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8:00 Keynotes: Nanotech & Cleantech & TechConnectTheater AB
 Session chair: Matthew Laudon, NSTI and Patti Glaza, CTSI
8:00 The Nanotech Revolution in Renewable Energy
D. Arvizu - Director, National Renewable Energy Laboratory (NREL), U.S. Department of Energy, US (bio)
8:30 Nanotechnology and the Obama Administration
T. Kalil, Office of Science and Technology Policy, The White House, US
9:00 Innovation for a Secure Future
R. Johnson - CTO, Lockheed Martin, US (bio)
9:30 The Next Big Thing is Really Small
R.J. Kumpf - CAO, Bayer Material Science, US (bio)
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10:30 NanoFab: Fundamentals - self assembly, synthesis, and patterningRoom 370 BE
 Session chair: Guy DeRose, Caltech, US
10:30 Thermodynamics and patterning of surfactant mixtures on curved surfaces
F. Stellacci, Massachusetts Institute of Technology, US
11:00 Catalyst-Free, High-Speed Synthesis of ZnO Nanostructures
J. Pedersen, K.S. Teh, San Francisco State University, US
11:20 Synthesis and characterization of nanoporous alumina films with controlled physical and chemical attributes
N.A. Monfared, S. Atre, R. Kishton, S. Varadarajan, Oregon State University, US
11:40 Controlled Attachment of Gold Nanoparticles on Ordered Titania Nanotube Arrays
M. AbdElmoula, E. Panaitescu, L. Menon, Northeastern University, US
12:00 Structural and Optical Properties of Zinc Oxide Nanoparticles Synthesized using Continuous Spray Pyrolysis Reactor
V. Dutta, V. Phanikaran B., C. Dwivedi, Indian Institute of Technology Delhi, IN
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10:30 MEMS: InkJet ArchitecturesRoom 371 BE
 Session chair: Chris Menzel & Jan Sumerel, FujiFilm, US
10:30 History and Continuing Role of InkJet
C. Menzel, FujiFilm, US (bio)
10:40 Continuous Inkjet Printing
E.P. Furlani, Eastman Kodak Company, US (bio)
11:05 Piezoelectric Inkjet Technology
X. Wang, FujiFilm, US
11:30 (CANCELED) Electrohydrodynamic Micro-droplet Generation on Both Conducting and Non-conducting Surfaces by Electric Induction
B.S. Lee, J.-G. Lee, H.-J. Cho, N. Huh, C. Ko, Samsung Advanced Institute of Technology, KR
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10:30 MEMS & Wireless: Environment & Society ApplicationsRoom 371 AD
 Session chair: Elena Gaura, Coventry University, US
10:30 MEMS & Wireless: bringing the power of small to the people
E. Gaura, Coventry University, UK (bio)
10:55 Experiences in Engineering Wireless Sensor Networks for Glaciers
K. Martinez, University of Southampton, UK (bio)
11:20 Wireless Sensor Networks to enable the Passive House
J. Brusey, T. Daniel, X. Fei, N. Poole, E.I. Gaura, Coventry University, UK (bio)
11:45 Wireless Sensor Networks for Aerospace Applications- Thermal Monitoring for a Gas Turbine Engine
D. Goldsmith, E. Gaura, J. Brusey, J. Shuttleworth, Cogent Computing Applied Research Centre, Coventry University, UK
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1:30 NanoFab: SPL METHODS - Bottom up assemblyRoom 370 BE
 Session chair: Jason Haaheim, NanoInk, US
1:30 Advances in Biological Sensing and Manipulation by DPN and SERRS
D. Graham, University of Strathclyde, UK
2:00 Temperature Controlled Dip-Pen Nanolithography
R.G. Sanedrin, N.A. Amro, J. Rendlen, M. Nelson, NanoInk, US
2:20 High-speed, Sub-15 nm Feature Size Thermochemical Nanolithography
D. Wang, R. Szoszkiewicz, T. Okada, S.C. Jones, V. Kodali, W.D. Underwood, J.E. Jarvholm, M. Rumi, W.P. King, J.E. Curtis, S.R. Marder, E. Riedo, Georgia Institute of Technology, US
2:40 Using Nanolithography: From Synthesis of Materials to Metrology Platforms
N. Singh, V. Sathyamurthi, A. Patil, R. Gargate, D. Banerjee, Texas A&M University, US
3:00 Plasma-Directed Organized Nanodot Formation on Polymeric Surfaces
D. Kontziampasis, N. Vourdas, G. Boulousis, V. Constantoudis, A. Tserepi, E. Gogolides, N.C.S.R. “Demokritos”, GR
3:20 Direct nanotransfer printing of metal electrodes with sub-15-nm gaps
S. Harrer, S. Strobel, G. Scarpa, G. Abstreiter, M. Tornow, P. Lugli, Technische Universitaet Muenchen, DE
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1:30 MEMS: InkJet Drop FormationRoom 371 BE
 Session chair: Chris Menzel & Jan Sumerel, FujiFilm, US
1:30 Piezoelectric Inkjet Printing of Metal Particle Films
L.F. Deravi, D.E. Cliffel, D.W. Wright, Vanderbilt University, US
1:55 Interplay between simulation, theory, and experiment in inkjet printing of complex fluids
O.A. Basaran, P. Bhat, H. Gao, Q. Xu, Purdue University, US (bio)
2:25 Curvilinear Waveforms for Fluid Dispensing
J. Clark, Zebra Technologies, US (bio)
2:45 Methods & Results from the Cambridge Inkjet Research Centre
S.D. Hoath, G.D. Martin, I.M. Hutchings, University of Cambridge UK, UK
3:15 Acoustic measurement of bubble size and position in an inkjet printhead
A. van der Bos, R. Jeurissen, J. de Jong, M. van den Berg, H. Wijshoff, H. Reinten, M. Versluis, D. Lohse, University of Twente, NL
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1:30 MEMS & Wireless: Increasing Human SafetyRoom 371 AD
 Session chair: Elena Gaura, Coventry University, US
1:30 Wireless sensor networks for space applications
D. Benhaddou, University of Houston, US (bio)
1:55 Wireless Sensor Networks for Emergency Response Applications
R. Stoleru, Texas A&M University, US (bio)
2:20 Priority Based Message Transmission over Unreliable Wireless Links for Safety Critical Monitoring Applications
X. Fei, J. Kemp, E.I. Gaura, J. Brusey, Cogent Computing Applied Research Centre, Coventry University, UK
2:40 Wireless sensor networks for activity monitoring in safety critical applications
R. Rednic, E.I. Gaura, J. Brusey, Coventry University, UK
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4:00 NanoFab: Tools and Instrumentation Showcase - 1Room 370 BE
 Session chair: Aaron Stein, Brookhaven National Lab, US
4:00 Making Hands-on Nanoscale Science and Engineering Education a Broader Reality with the NanoInk NanoProfessor
J.R. Ireland, NanoInk, Inc., US
4:20 Raman microanalysis for nano-materials: Bringing Raman spectroscopy to the SEM and AFM microscope and the new SERS imaging techniques
R. Bormett, Renishaw, US
4:40 Focused Ion Beam machining of large and complex nanopatterns
O. Wilhelmi, L. Roussel, P. Anzalone, D.J. Stokes, P. Faber, S. Reyntjens, FEI Company, NL
5:00 Cost Saving Strategies: Using a project planning process that can integrate capital and operational spending into a Nanofabrication Business Plan
A. Gregg, M. Strnad, Abbie Gregg, Inc., US
5:20 Nanofabrication using Step and Flash Imprint Lithography
D. Resnick, Molecular Imprints, US
5:40 The application of E-beam lithography to fabrication of photonic crystals
T. Osada, JEOL, US
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4:00 MEMS: InkJet ApplicationsRoom 371 BE
 Session chair: Chris Menzel & Jan Sumerel, FujiFilm, US
4:00 Deposition of Functionalizing Materials on Photonic Microcantilever Chemical/Biological Sensors using Inkjet Technology
S.J. Ness, S. Kim, G.P. Nordin, Brigham Young University, US
4:20 High-Speed Room Temperature Curing of Metallic Inks
S. Farnsworth, K. Schroder, D. Pope, NovaCentrix, US
4:40 Enabling massive printed electronics: inkjet printing on low-cost substrates
F. Varela, E. Armendáriz, M. Aresti, R. Zárate, CEMITEC - Fundación Cetena, ES
5:00 Inkjet ink containing inorganic doped semiconductor (ZnS:Mn) nanoparticle pigments
P.D. Angelo, R.R. Farnood, University of Toronto, CA
5:20 Inkjet Printing of Solid Oxide Fuel Cell Electrolyte and Cathode Layers
A.M. Sukeshini, R. Cummins, J. McCoppin, N. Herrmann, T. Reitz, D. Young, Wright State University, US
5:40 Tool for inkjet drop optimisation
C.L. Ayling, TTP, UK
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4:00 MEMS & Wireless: PowerRoom 371 AD
 Session chair: Elena Gaura, Coventry University, US
4:00 Wireless and Mobile Sensor Networks for Smart Civil Structures
Y. Wang, Georgia Tech, US (bio)
4:25 Nanochip - Ultra-High Data Density MEMS Memory Device
D. Adams, N. Belov, T-K. Chou, J. Heck, B. Kim, G. Knight, Q. Ma, V. Rao, G. Tchelepi, Nanochip, Inc., US
4:45 Study on Application of Piezoelectric Vibration Energy Harvesters for Powering of Wireless Sensor Nodes in Large Rotary Machine Diagnostic Systems
B. Pekoslawski, P. Pietrzak, M. Makowski, L. Szafoni, A. Napieralski, Technical University of Lodz, PL
5:05 Power consumption of microelectronic equipment for wireless sensor networks
N. Poole, T. Mo, J. Brusey, Coventry University, UK
5:25 (CANCELED) Low Cost Paper Based Bowtie Tag Antenna for High Performance UHF RFID Applications
Y. Amin, S. Prokkola, B. Shao, J. Hållstedt, Q. Chen, H. Tenhunen, L-R Zheng, Royal Institute of Technology (KTH), SE
5:45 Fully On-Chip High Q Inductors Based on Microtechnologies
K. Shah, N. Khalid, J. Singh, H.P. Le, J. Devlin, Z. Sauli, La Trobe University, AU

Tuesday May 5

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8:00 Keynotes: Nanotech & Cleantech & TechConnectTheater AB
 Session chair: Jeff Moseley, Greater Houston Partnership, Shushana Castle, Clinton Global Initiative Member/Millennium Water Alliance, US
8:00 Welcome TechConnect World to Houston
J. Moseley, Greater Houston Partnership, US
8:15 Can Uncle Sam Cure What Ails Clean Tech?
P. Dickerson, HaynesBoone, former COO Office of Energy Efficiency & Renewable Energy, DOE, US (bio)
8:45 Welcome to Houston
B. White, City of Houston, Mayor, US
9:00 Flying into the Future: Continental’s Commitment to the Environment
L. Kellner, Continental Airlines, CEO, US (bio)
9:30 RUSNANO: Driving the Nanotech Industry Growth
A. Chubais, RUSNANO, CEO, RU
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11:00 MEMS: Computational Methods, Simulation & Software ToolsRoom 371 BE
 Session chair: Gerhard Goldbeck-Wood, Accelrys, Inc., UK
11:00 An Online Tool for Simulating Electro-Thermo-Mechanical Flexures Using Distributed and Lumped Analyses
F. Li, J.V. Clark, Purdue University, US
11:20 A Parallel-plate-based Fishbone-Shape MEMS Tunable Capacitor with Linear Capacitance-Voltage Response
M. Shavezipur, P. Nieva, A. Khajepour, S.M. Hashemi, University of Waterloo, CA
11:40 Silicon die self-alignment on a wafer: stable and instable modes
J. Berthier, F. Grossi, L. Di Cioccio, Cea-Leti Minatec, FR
12:00 Effect of Nonlinear Structural Stiffness on the Response of Capacitive MEMS Devices
M. Shavezipur, P. Nieva, A. Khajepour, S.M. Hashemi, University of Waterloo, CA
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10:30 NanoFab: Alternative Top-down Fabrication ModesRoom 370 BE
 Session chair: Leo Ocola, Argonne National Lab, US
10:30 Directing Block Copolymer Patterns within Bit Patterned Media Specifications
R. Ruiz, Hitachi Global Storage, US
11:00 Hierarchical nano-structuring by combining ion induced self-organization and lithographic pre-patterning
F. Frost, B. Ziberi, T. Lutz, M. Cornejo, R. Fechner, D. Hirsch, K. Zimmer, Leibniz-Institute of Surface Modification, DE
11:20 The first Italian micro exposure tool for EUV lithography: design guidelines and experimental results
F. Flora, S. Bollanti, P. Di Lazzaro, L. Mezi, D. Murra, A. Torre, ENEA, IT
11:40 Stretegies for fabrication of nanostructures using focused ion beam technology
V.J. Gadgil, MESA+ institute for nanotechnology, NL
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10:30 MEMS & NEMS: Sensors & Systems: Invited LecturesRoom 371 AD
 Session chair: Elena Gaura, Coventry University, US
10:30 A Design Environment for the Cost Optimization of Wireless Sensor Networks
M. Niedermayer, University of Berlin, DE (bio)
11:00 MEMS & Wireless: from devices to microrobotic swarms
D. Popa, University of Texas at Arlington, US (bio)
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1:30 NanoFab: Integration & NanodevicesRoom 370 BE
 Session chair: Guy DeRose, Caltech, US
1:30 Integration of Lithographically Printed Optical, Fluidic and Electronic Systems
A. Scherer, Caltech, US (bio)
2:00 Fabrication of Guided-mode Resonance Devices by Soft Lithography in Hybrimers
K.J. Lee, R. Magnusson, J.H. Jin, B.-S. Bae, University of Texas at Arlington, US
2:20 High-Yield Fabrication and Characterizations of Sub-50 nm Nanomechanical Resonators
C. Guthy, R. Das, S. Evoy, University of Alberta, CA
2:40 Scalable manufacturing of room-temperature single electron transistors via “amphibious”
L.C. Brousseau, Quantum Logic Devices, US
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1:30 MEMS & NEMS: Novel Materials, Processes & DevicesRoom 371 AD
 Session chair: Cy Wilson, NASA, US
1:30 Advancement of Prototyping and Fabrication Techniques for Active Sensors and Microelectronics
J.L. Zunino, D.R. Skelton, U.S. Army ARDEC, US
1:50 The Design, Fabrication and Characterization of A Novel Miniature Silicon Microphone Diaphragm
W. Cui, R.N. Miles, Q. Su, State University of New York at Binghamton, US
2:10 Nano-Electrodeposits of MEMS Directional Microphones for Hearing Aid Optimization
S.-S. Je, J. Kim, M.N. Kozicki, J. Chae, Arizona State University, US
2:30 Pneumatically driven Auxiliary Micro Tools for Desktop Factories
B. Hoxhold, S. Büttgenbach, Technische Universität Braunschweig, DE
2:50 Nanocomposite Contact Material for MEMS Switches
C. Ding, N.C. MacDonald, University of California, Santa Barbara, US
3:10 Photosensitive Glass for Ultra High Aspect Ratio Features
J.H. Flemming, R. Mack, C. Buckley, Life BioScience, Inc., US
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4:00 POSTERSExpo Hall
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NanoFab: Novel Materials, Structures & ProcessesExpo Hall
- Horizontally oriented long carbon nanotubes grown on Si substrates by using a catalytic Chemical Vapor Deposition process
E. Dervishi, Z. Li, Y. Xu, F. Watanabe, V. Saini, A.R. Biris, A.S. Biris, University of Arkansas at Little Rock, US
- Electrochemical Charging of Carbon Nanotubes for Tunable Electron Field Emission Cathodes
A. Kuznetsov, A. Zakhidov, N. Barisci, A. Zakhidov, The University of Texas at Dallas, US
- Optical properties of Zinc Oxide/Polymer Nanocomposite
S.C. Singh, R.K. Swarnkar, R. Gopal, University of Allahabad, IN
- A Precise Reclaim Fabrication by Nanoscale Removal Processes using a Design of Ellipsoidal Anode
P.S. Pa, National Taipei University of Education, TW
- Pulsed Laser Deposition of CaxBa1-xNb2O6 Thin Film on Nano-patterned Silicon Substrate
I. Stateikina, S. Delprat, M. Chaker, Institut National de la Recherche Scientifique, CA
- The Use of Microreactors for Manufacturing of High Performance Nanomaterials
B.K. Paul, C-H Chang, Oregon State University, US
- A Revolutionary Approach the Production and Dispersion of a Vast Array of Metal Oxide and Mixed-Metal Oxide Nanoparticles
B.F. Woodfield, J. Boerio-Goates, L. Astle, Brigham Young University, US
- In situ synthesis of metal nanoparticles embedded multifunctional PDMS films
A. Goyal, A. Kumar, P.K. Patra, S. Mahendra, P.J.J. Alvarez, P.M. Ajayan, Rice University, US
- Self-organized nanostructures on semiconductor surfaces by low-energy ion beam erosion
M. Cornejo, B. Ziberi, J. Völlner, F. Frost, B. Rauschenbach, Leibniz-Institute of Surface Modification, DE
- Growth and Microstructure of Si Core/Ge Shell Nanowires
J-S Park, L. Cao, M.L. Brongersma, W-K Seong, B.M. Clemens, Stanford University, US
- A low temperature fabrication of AlO2 films with supercritical CO2 fluid treatment for OTFT application
P.T. Liu, Y.T. Chou, C.S. Huang, L.F. Teng, Y.L. Huang, National Chiao-Tung University, TW
- Fabrication of High-Aspect-Ratio Nanochannels using Novel Nanoscale Silicon Mold and Solvent Assisted Sealing
Y.H. Cho, J. Par, H. Park, X. Cheng, B.J. Kim, A. Han, Texas A&M University, US
- Curved Polymer Nanochannel Fabrication using PMMA Layer Transfer and Collapse
Y.H. Cho, H. Park, H.S. Kim, X. Cheng, A. Han, Texas A&M University, US
- Nanometric AlN Thin Films Growth by Non Reactive RF Sputtering
C. Chesman, J.A.S. Moura, I. Guedes, Universidade Federal Do Rio Grande Do Norte, BR
- Batch Fabrication at Room Temperature of Arrays of Freestanding Nanoneedles
S. Arva, M.M. Yazdanpanah, R.W. Cohn, University of Louisville, US
- Systematic Study of Nanoscale Resolution for Low-Energy Electron Beam Lithography
M.A. Mohammad, Zs. Szabó, T. Fito, J.M. Lee, J. Chen, M. Aktary, S.K. Dew, M. Stepanova, National Institute for Nanotechnology, CA

Wednesday May 6

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8:00 Keynotes: Nanotech & Cleantech & TechConnectTheater AB
 Session chair: Patti Glaza, CTSI, US
8:00 Energy in the 21st Century: Muir, Patton, and Gandhi
R. James Woolsey, VantagePoint Venture Partners, US (bio)
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8:30 Keynote Panel: The Future of EnergyTheater AB
 Session chair: Patti Glaza, CTSI, US
- D. Beneby, Exelon, President, Exelon Power, US
- M. Kapner, Austin Energy, US
- C. Frasier, Shell, VP Americas, US (bio)
- M. Simmons, Simmons & Company, US
- J. Renaud, GE Ecomagination, US
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10:30 NanoFab: DPN ApplicationsRoom 370 BE
 Session chair: Jason Haaheim, NanoInk, US
10:30 Dip Pen Nanolithography® Provides for the Critical Definition of the Environment to Control Human Adult Stem Cell Populations
J. Hunt, University of Liverpool, UK
11:00 Deconstructing Receptor Signaling with Chemically Nanopatterned Interfaces
K. Salaita, UC - Berkeley, US
11:20 Biological Applications of Lipid-Based Dip-Pen Nanolithography
S. Lenhert, Forschungszentrum Karlsruhe GmbH, Institut für NanoTechnologie, Germany, DE
11:40 Manipulating Nanostructures with Chemically Patterned Surface
Y. Wang, University of Maryland, US
12:00 Single-Protein Control on Nanoarrays generated by Dip-Pen Nanolithography
D. Maspoch, Institut Catala de Nanotecnologia, Spain, ES
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10:30 Micro & Nano Fluidics - Transport PhenomenaRoom 351 AD
 Session chair: Daniel Attinger, Columbia University, US
10:30 Micro & Nano Fluidics - Overview
D. Attinger, Columbia University, US (bio)
11:00 Mathematical modeling of moving contact lines with applications to microscale heat transfer
V. Ajaev, SMU in Texas, US (bio)
11:30 On the use of Segmented Flow to Enhance Heat Transfer in Microchannel Heat Sinks
A.R. Betz, D. Attinger, Columbia University, US
11:50 Engineered Nanostructures for High Thermal Conductivity Substrates
K.K. Varanasi, P. Chamarthy, S. Chauhan, P. de Bock, T. Deng, A. Kulkarni, G. Mandrusiak, B. Rush, B. Russ, L. Denault, S. Weaver, F. Gerner, Q. Leland, K. Yerkes, Massachusetts Institute of Technology, US
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1:30 POSTERSExpo Hall
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NanoFab: Novel Materials, Structures & ProcessesExpo Hall
- Electrical Characteristics of Mesoporous Pure Silica Zeolite for 32 nm CMOS Interlayer Dielecric Films
T. Kikkawa, Hiroshima University, JP
- p-Type Single-Wall Garbon Nanotube Network on n-Type Si for Heterojunction Photovoltaic Cells
Z. Li, Y. Xu, V. Saini, E. Dervishi, M. Mahmood, A.R. Biris, A.S. Biris, University of Arkansas at Little Rock, US
- Nano-scaled water ejection using Nanopipette with QTF-AFM for Nanolithography
S.M. An, S.J. Jang, H.E. Noh, W.H. Jhe, Seoul National University, KR
- Single-step synthesis of visible-light TiO(2-X)N(X) photocatalyst nanopowder by thermal plasma
C-Y Tsai, H-C Hsi, National Kaohsiung First University of Science & Technology, TW
- Analysis of density variation for different temperatures in thermal nano imprinting process
D-E Lee, H-J Lee, S-W Choi, W-I Lee, Seoul National University, KR
- Fabrication of nanogap-based field effect transistor using nanoimprint lithography
J. Lee, M.-C. An, K.-D. Kim, J.-H. Jeong, J.-H. Ahn, Y.K. Choi, Korea Institute of Machinery and Materials, US
- Spark Plasma Synthesis (SPS) Device for Sintering of Nanomaterials
N. Jalabadze, L. Nadaraia, A. Mikeladze, R. Chedia, T. Kukava, L. Khundadze, Technical University of Georgia, GE
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MEMS & NEMS: Novel Materials & ProcessessExpo Hall
- Fabrication of Nanostructures on Curved Surfaces Using PDMS Stamp
B. Farshchian, S. Park, Louisiana State University, US
- Deposition of beta-SiC thin films on Si (100) substrates by MOCVD method for NSOM applications
S-H Nam, M-H Kim, J-S Hyun, J-H Boo, Sungkyunkwan University, KR
- MEMS Process Compatibility of Multiwall Carbon Nanotubes
E.H. Cook, D.J.D. Carter, The Charles Stark Draper Laboratory, US
- Design of Multi – Dimensional Variable Capacitors for RF MEMS
V.K. Lamba, D. Engles, S.S. Malik, A. Gupta, HCTM Kaithal, IN
- Dielectrophoresis and Comsol Simulation of Cell Entrapment At Electrodes
D. Padmaraj, W. Zagozdzon-Wosik, R. Pande, J.H. Miller, L-M Xie, J. Wosik, University of Houston, US
- BioMEMS for Mitochondriaa Medicine
D. Padmaraj, W. Zagozdzon-Wosik, Lei-Ming Xie, D. Pijanowka, J.H. Miller, P. Grabiec, J. Wosik, University of Houston, US
- Contactless Micro Position and Angular Sensor Device Based on Micro Structured Polymer Magnets
A. Waldschik, M. Feldmann, J. Dittmer, S. Büttgenbach, Technische Universität Braunschweig, DE
- Micro-Fabricated Electrostatic Voltage Sensor with a Thin Bulk-Silicon Device Layer
J. Dittmer, R. Judaschke, S. Büttgenbach, Technische Universität Braunschweig, DE
- Nanostructured 1D-FET for Remote Sensing Applications
K.T. Chiang, B. Lanning, Southwest Research Institute, US
- Micro-and Nanoscale Applications of Nanocrystalline Diamond Films
A. Kumar, S. Balachandran, T. Weller, University of South Florida, US
- Nodal Modeling of CMOS-MEMS Variable Capacitors
C.I. Lee, C.H. Wang, J. Reinke, T. Mukherjee, Industrial Technology Reseach Institute, TW
- Real-Time and Label Free Direct Sensing of Important Drug Molecules Using Nanostructured Polymeric Thin Films of Novel Conducting Polymers
R. Pernites, P. Dutta, R. Advincula, University of Houston, US
- Amperometric Detection of Staphylococcal Enterotoxin B in milk using Magnetic Bead-Based Immunoassay on Disposable Screen Printed Carbon Electrode Strip
S.K. Rastogi, S. Gibbon, J.R. Branen, A.L. Branen, University of Idaho, US
- A Multifunctional MWCNT strain sensor: sensing and damping
X. Li, A.K. Keshri, A. Agarwal, C. Levy, Florida International University, US
- Energy Conversion according to Impact loading on Piezoelectric material
J. Lee, T. Kim, B. Choi, Sogang University, KR
- Probing Test of the High Density Microprobe Array with Out-Of-Plane Predeformation
T. Lai, C. Tsou, H-C Li, Feng Chia University, TW
- A Novel Virtual Button User Interface for Determining the Characteristics of an Impulse Input Based on MEMS Inertial Sensors
A. Zwart, D. Effa, P. Nieva, S. Lancaster-Larocque, University of Waterloo, CA
- The Study of Mechanical Stress in NEMS Heterostructures
X. Xu, B. Bogdan, F. Lime, L. Montes, Grenoble institute of technology, FR
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3:30 NanoFab: Tools and Instrumentation Showcase - 2Room 370 BE
 Session chair: Jason Haaheim, NanoInk, US
3:30 Industrial applications of spherical polymer particles and hollow silica shells
D.E. Lynch, Exilica Limited, UK
3:50 Microfluidizer High Shear Processing
T. Panagiotou, K.J. Chomistek, Microfluidics Corporation, US
4:10 Silane-Free, Solid Pre-cursor For SiC deposition
M. Davies, Sixtron Advanced Materials Inc, CA
4:30 Screenless Agitator Bead Mill for the Use of Smallest Grinding Media
S. Mende, J. Hill, NETZSCH Fine Particle Technology LLC, US
4:50 New Applications for CMP: Solving the Technical and Business Challenges
R.L. Rhoades, Entrepix, Inc., US
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3:30 MEMS & NEMS: Molecular & Gas SensorsRoom 371 AD
 Session chair: Elena Gaura, Coventry University, US
3:30 Evaluating Nanomaterials Integrated with Microsensor Arrays for Breath Monitoring
K.D. Benkstein, B. Raman, C.J. Martinez, C.B. Montgomery, S. Semancik, National Institute of Standards and Technology, US
3:50 Microfluidic Platforms with Micro- and Nanopore Membranes and in situ Formation of Lipid Bilayer in the Microfluidic Platform
J. Choi, N. Kim, S. Park, Louisiana State University, US
4:10 Detecting CH4 and CO Gases Using Micro-Structural Doping Compound Oxide Films on Si-Substrates
Y.F. Li, S.Y. Ma, L.B. Kish, J.-J. Ding, Northwest Normal University, US
4:30 Unique molecular identification using two-dimensional responses
G. Koley, M. Qazi, University of South Carolina, US
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3:30 Micro & Nano Fluidics - ApplicationsRoom 351 AD
 Session chair: Daniel Attinger, Columbia University, US
3:30 Nanotechnology Platforms for Studying Cellular Heterogeneity and Disease Biosignatures
F. Zenhausern, Arizona State University, US (bio)
3:55 Advances in PCR Using Natural Convection
V. Ugaz, Texas A&M University, US
4:20 Manufacturing of sensors and other MEMS devices using ink-jet technology
D. Wallace, MicroFab, US (bio)
4:45 Analysis of an Electrostatically Actuated MEMS Drop Ejector
E.P. Furlani, Eastman Kodak Company, US
5:05 A Solid Electrolyte Valve for Micro/Nano-fluidics
Y. Yang, X. Zhang, M.N. Kozicki, J. Chae, Arizona State University, US
5:25 (CANCELED) A Hydrophobicity Controlled Nanofluidic Pump
H. Liu, S. Dharmatilleke, A.A.O. Tay, Institute of Materials Research and Engineering, SG

Topics & Application Areas

  • CMOS Integration & Design
  • MEMS Front-End Processes
  • MEMS Litho & Patterning Processes
  • MEMS Back-End Processes
  • MEMS Packaging Technologies
  • Metrology & Inspection Methodology
  • CMOS Integration Processes
  • Novel Materials & Processes
  • Process Control
  • Other

Business & Initiatives Topics & Application Areas

  • Company Profile Showcase
  • IDM, Foundry, Fabless Model - Showcase
  • MEMS Design Tools
  • Process Design Tools
  • MEMS Fab Equipment
  • MEMS Characterization Equipment
  • MEMS Handling Equipment
  • MEMS Packaging Equipment
  • MEMS Design Services
  • Prototyping Services
  • Best Practice Case Studies
  • System vs. Component
  • Filling Your Fab
  • Other

Journal Submissions

Sensors & Transducers

On-line Journal ‘Sensors & Transducers’

Selected proceedings papers in the Electronics and Microsystems Track (MEMS & NEMS, Sensors & Systems, Micro & Nano Fluidics symposia, and MSM conference) will be reviewed and invited into a Special Issue of the on-line journal ‘Sensors & Transducers’.

For consideration into this Special Issue of the on-line journal ‘Sensors & Transducers’, please select the “Submit to Sensors & Transducers” button during the on-line submission procedure.

Journal of Experimental Nanoscience

Journal of Experimental Nanoscience

Selected Nanotech Proceedings papers will be reviewed and invited into a Special Issue of the Journal of Experimental Nanoscience. The journal provides a showcase for advances in the experimental sciences underlying nanotechnology and nanomaterials.

For consideration into this Special Issue of the Journal of Experimental Nanoscience, please select the “Submit to Journal of Experimental Nanoscience” button during the on-line submission procedure. You may only select a single journal during the submission process.

Molecular Simulation

Molecular Simulation

Selected Nanotech Proceedings papers will be reviewed and invited into a Special Issue of Molecular Simulation. The journal covers all aspects of research related to, or of importance to, molecular modelling and simulation (including informatics, theoretical and experimental work).

For consideration into this Special Issue of Molecular Simulations, please select the “Submit to Molecular Simulation” button during the on-line submission procedure. You may only select a single journal during the submission process.

Symposium Coordinator

Matthew Laudon
Nano Science and Technology Institute

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