NSTI Nanotech 2009

The SRC’s Global Research Collaboration and Focus Center Research Program

Steven Hillenius

Steven Hillenius

Vice President
Semiconductor Research Corp.

Steven Hillenius is vice president of the Semiconductor Research Corp . (SRC, Research Triangle Park, N.C.). Before SRC, he headed technology development and collaborative interactions for Agere Systems and Bell Laboratories. His team at Bell Labs was the first to produce 60 nm transistors, and they conducted much of the early materials innovation on high-k gate dielectrics and novel three-dimensional device structures. He managed partnerships and joint-development programs with NEC, STMicroelectronics, TSMC and Chartered Semiconductor. Hillenius is an IEEE Fellow, past president of the IEEE Electron Devices Society, and a board member of the IEEE. He holds eight patents that resulted from his device and process research, and has published more than 60 technical papers. Hillenius received a B.S. in physics from the University of Delaware in 1973 and a Ph.D. in physics from the University of Virginia in 1979. SRC is a semiconductor and related technologies university research consortium, composed of 23 companies and partners and 100 universities worldwide.

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