NSTI Nanotech 2009

Fabrication of Guided-mode Resonance Devices by Soft Lithography in Hybrimers

K.J. Lee, R. Magnusson, J.H. Jin, B.-S. Bae
University of Texas at Arlington, US

Keywords: guided-mode resonance, filter, lithography, hybrimer


Diffractive optical elements and photonic crystals consist of fine spatial patterns designed to affect the spectrum, polarization, phase and other properties of light. Periodic layered structures are widely used in integrated optics, communication systems, spectroscopy, lasers, and other important optical systems. New spectral device properties are enabled by leaky-mode resonance effects in compact architectures. We present new resonant narrow-band optical filters fabricated by soft lithography in hybrimer compounds. By using elastomeric composite mold, the photopolymer grating structure is readily fabricated. A UV-curable hybrimer constitutes the periodic layer. Hybrimers are fluorinated organic-inorganic materials that exhibit low optical loss and controllable low viscosity. In addition, hybrimers do not require additional chemical treatment for releasing of a mold. With this approach, we realize experimental devices with resonance wavelength of 1538 nm and reflectance efficiency at resonance of ~81%. The full-width at half-maximum linewidth is 5 nm and the sideband reflectance is ~5%. The sidebands can be suppressed by improving the device design. The transmittance at resonance is ~8%. The fabricated resonance device can be applied as an optical bandstop filter. Different types of guided-mode resonance devices can be effectively achieved by this simple fabrication approach.
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