NSTI Nanotech 2009

Characterization of Nanoparticulate and Nanoporous Thin Films by GISAXS

J. Li, A. Takase and T. McNulty
Rigaku Americas Corporation, US

Keywords: Nanoparticulate, Nanoporous Thin Films


Small-angle x-ray scattering (SAXS) has long been used as a technique for the characterization of both crystalline and disordered materials. Traditional 3 pinhole cameras with long camera lengths and a high powered X-ray source have been required to collect high quality SAXS data to the weak scattering at small q values. Here, we show some examples of SAXS measurements made with a line focus scanning geometry using cross beam optics (CBO) mounted a high resolution wide angle x-ray diffractometer. This geometry is particularly well suited for the measurements of deposited nanomaterials using the glancing incidence SAXS (GISAXS) method. Examples of the characterization of random nanoparticulate and nanoporous thin films using this technique shows that GISAXS is a suitable method for the determination of the particle/pore size distributions in thin films.
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