NSTI Nanotech 2009

A Multiscale Model of Micro Cantilever Arrays

M. Lenczner, E. Pillet, S. Cogan, H. Hui

Keywords: cantilever arrays, multiscale modelling, numerical simulation, reduced order models


Abstract:The presentation is a contribution in the area of MEMS Array modelling. In some cases, Arrayed Microsystems present coupling between their components, and their global simulation cannot be performed taking into account individual sub-systems separately. This renders computation unpracticable for large number of units. We encountered this difficulty when considering Arrays of Cantilevers which are, for instance, parts of Arrays of Atomic Force Microscopes. Through the presentation, we introduce a two-scale simplified model which overcomes this problem. First, the principle of its mathematical construction is shortly reviewed. Then, its structure and the strategy used for discretization is explained. Its validation through comparison with full simulations and through dedicated identification procedures is discussed. Finally, cross-talk effects quantified through model simulations are reported.
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