NSTI Nanotech 2009

Design of Multi – Dimensional Variable Capacitors for RF MEMS

V.K. Lamba, D. Engles, S.S. Malik, A. Gupta
HCTM Kaithal, IN

Keywords: electrostatic actuation, MEMS, modeling


Abstract— In this work, a multi dimensional RF MEMS variable capacitor that utilizes electrostatic actuation is designed. Here we preferred Electrostatic actuation due to its low power consumption. The RF MEMS variable capacitor is designed in a CPW topology, with multiple beams (1 to 7) on a single pedestal. For the varactors designed herein, the actuation voltage is approximately 15 – 100V. Full-wave electromagnetic simulations are performed from 1 – 25GHz to accurately predict the frequency response of the varactors. The EM simulations and the measurement results compare favorably. A series RLC equivalent circuit is used to model the varactor and used to extract the parasitic associated with the capacitor by optimizing the model with the measurement results
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