NSTI Nanotech 2009

Effective Removal Module by Excimer Irradiation Assistance

P.S. Pa
National Taipei University of Education, TW

Keywords: nano-particles, excimer irradiation, digital paper, touch-panel, PET-Diaphragm, micro-electroremoval


A new design module using an excimer irradiation to assist in micro-electroremoval process as a precise recycle modus for the digital paper of the touch-panel offers a faster per-formance in removing the Indium-tin-oxide thin-films from the surface of the optical PET-diaphragm (PET) was developed. The low yield of the Indium-tin-oxide deposition is an im-portant factor in optoelectronic semiconductor production. In the current study, the Indium-tin-oxide layers proved difficult to remove, the excimer irradiation can be used to help with its removal. During the digital paper recycle processes the use of a 172nm excimer-lamp can remove the stubborn film residues, effectively improving the Indium-tin-oxide removal rate. For executing the removal-process of the fabrication, through the excimer irradiation pro-posed, the stubborn thin-films were easily broken up from the layer’s compositions to the nano-particles and escaped from the PET substrate quickly and cleanly. It is possible to effi-ciently strip away the Indium-tin-oxide. The optoelectronic semiconductors industry can ef-fectively reclaim defective products, thereby reducing production costs.
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