NSTI Nanotech 2009

Sacrificial membranes for serial valving in microsystems

M. Allain, J. Berthier, S. Basrour, P. Pouteau
Cea-Leti Minatec, FR

Keywords: microvalves, microfluidics, sacrificial membranes, Joule heating, ultimate stress


Valving is essential to microflow circuits in microsystem technology. Many different types of valves have already been designed. Membranes of sacrificial materials have been studied for one shot valving; however, the new design proposed here, based on sacrificial micro-membranes with embedded electrodes, has the advantages to be more efficient than the previous existing devices, to produce calibrated openings, to be easy to pilot and to connect easily successively, one by one, a series of initially isolated micro-chambers of a silicon chip.
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