NSTI Nanotech 2009

Plasma-Directed Organized Nanodot Formation on Polymeric Surfaces

D. Kontziampasis, N. Vourdas, G. Boulousis, V. Constantoudis, A. Tserepi, E. Gogolides
N.C.S.R. “Demokritos”, GR

Keywords: nanofabrication, plasma, polymer, PMMA, self-assembly


Periodic, well-defined, features in the nano-scale are essential in several fields, such as photonics, nanoelectronics, catalysis, bioanalytics etc. A variety of bottom up methods may be employed to attain the desired patterning such as block-copolymers, poly(styrene)-PS nano-beads, colloidal particles and recently sputtering with energetic ions after several hours of treatment. We present a new, fast, low ion energy, plasma-assisted method of fabricating periodic nano-structures with controlled geometrical characteristics on polymer/plastic materials under appropriate plasma conditions. Changes in etch process parameters or the nature of the material leads to change in periodicity. We first aim to find how to control the periodicity of nanodots. Temperature and molecular weight of the PMMA have been found to have an effect on the periodicity and also the size of the dots that are formed with the proposed process. Second, we seek to better control the long range order, and third we aim to pattern transfer the polymer nanodots on Silicon and other substrates. Our results thus far suggest that under the proposed plasma process, spontaneously formed, self-organized, periodic nano-texturing is produced, with no special pretreatment. We propose to name this technique plasma-directed assembly of polymers.
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