NSTI Nanotech 2009

An Online Tool for Simulating Electro-Thermo-Mechanical Flexures Using Distributed and Lumped Analyses

F. Li, J.V. Clark
Purdue University, US

Keywords: electro-thermo-mechanical modeling, online software tool, FEA, lumped model analysis


We present an online software tool that enables both novices and experts to quickly and fairly accurately model and simulate an electro-thermo-mechanical microdevice. We model and simulate a MEMS thermal actuator by coupling finite element analysis (FEA) with network analysis. Commercial FEA software and SUGAR package are integrated in MATLAB for the simulation process. The simulation result is comparable to the experimental data. The thermo-mechanical part of the tool has free-access on nanoHUB.org with the support of RAPPTURE Toolkit.
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