2008 NSTI Nanotechnology Conference and Trade Show - Nanotech 2008 - 11th Annual

Partnering Events:

TechConnect Summit
Clean Technology 2008

Oxford Instruments

Oxford Instruments

We offer flexible, configurable process tools and leading-edge processes for the precise, controllable and repeatable etching, deposition and growth of micro- and nano-structures.

Our systems provide process solutions for the micro- and nanometre engineering of materials for semiconductor, optoelectronics, MEMS & microfluidics, high quality optical coating and many other applications in micro- and nanotechnology. These solutions are based on core technologies in:

  • plasma-enhanced deposition and etch
  • atomic layer deposition (ALD)
  • molecular beam epitaxy (MBE)
  • ion beam deposition and etch

Products range from compact stand-alone systems for R&D, through batch tools and up to clustered cassette-to-cassette platforms for high-throughput production processing.

Booth: 717

Web site:

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