2008 NSTI Nanotechnology Conference and Trade Show - Nanotech 2008 - 11th Annual

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Clean Technology 2008

Fabrication of interdigitated nanogap devices for biomolecular detection

H.J. Park, Y.S. Chi, C.S. Ah, D.H. Ha, I.S. Choi, W.S. Yun
Korea Research Institute of Standards and Science (KRISS), KR

interdigitated, nanogap, biomolecule, detection

One of the most fascinating fields of nanodevice research is its application to the detection of biologically important entities such as DNAs, peptides, antigens, enzymes, viruses, and cells. Nanoelectronic devices adopted in this study are usually based on the field effect transistor owing to its extreme sensitivity to surrounding electric charges. As an alternative platform for the nanodevice-based biomolecular detection, we report on the interdigitated nanogap device where the jump of electric conductance, driven by biomolecular recognition, between two electrodes separated by a few tens of nanometers is used as a measure of the existence of targeted biomolecules in a sample. Enhanced detectivity was obtained by the extension of the ‘effective’ length of the nanogap to be over 200 µm in a single device while maintaining the gap separation in the range of 50 – 100 nm. This rather complicatedly structured nanodevice was fabricated by applying the surface-catalyzed chemical deposition process to the electrodes pre-defined by photo/e-beam lithographic techniques. With this fabrication method, integration of the nanogap devices was quite straightforward, which in turn could be used to determine the concentration of biomolecules of interest: DNA and antigen in our case.

Nanotech 2008 Conference Program Abstract