2008 NSTI Nanotechnology Conference and Trade Show - Nanotech 2008 - 11th Annual

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Clean Technology 2008

Transfer of Aligned Single Crystal Silicon Nanowires to Transparent Substrates

S-C Shiu, C-Y Hsiao, S-C Hung, C-F Lin
Graduate Institute of Photonics and Optoelectronics, National Taiwan University, Taipei, Taiwan, 10617 R.O.C, TW

silicon, nanowires, transfer

In recent years, silicon nanowires (SiNWs) have attracted considerable attention due to their potential applications ranging from nanoelectronics to catalysis. The growth methods of SiNWs have some limitation as they need high temperature or high vacuum, complex equipments and other rigorous conditions. To fabricated SiNW-based devices on transparent substrates such as glass substrates or flexible plastic substrates, these methods are not suitable. In this work, we demonstrated the transfer of aligned single crystal SiNWs to transparent substrate with a relatively low transferring temperature. The low temperature fabrication processes are suitable for applications on glass or flexible plastic substrates.

Nanotech 2008 Conference Program Abstract