2008 NSTI Nanotechnology Conference and Trade Show - Nanotech 2008 - 11th Annual

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Clean Technology 2008

An Efficient Characterization Procedure for Piezoresistive Properties of MEMS Sensors

A.A.S. Mohammed, W.A. Moussa, E. Lou
University of Alberta, CA

characterization, piezoresistive properties, MEMS, sensors

The most important stage in Micro Electro Mechanical Systems (MEMS) development is the characterization and testing. In characterization, the material properties of the fabricated MEMS device are evaluated while in testing the sensor performance is evaluated under certain conditions. These conditions are the potential application conditions, which might be high or low temperature. Temperature variation is considered as one of the most crucial factors that affect the sensor performance. Successful application of the developed sensor, however, requires accurate evaluation of the piezoresistive properties, which control the sensor output signal, sensitivity and resolution. In this paper, an efficient characterization procedure to accurately evaluate the piezoresistive coefficients is presented. The target from this procedure is to introduce guidelines for the experimental evaluation of piezoresistive sensors. Moreover, the test structures that are grouped here can be included on the microfabrication mask during the mask design process.

Nanotech 2008 Conference Program Abstract