2008 NSTI Nanotechnology Conference and Trade Show - Nanotech 2008 - 11th Annual

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Clean Technology 2008

Physical Carrier Mobility in Compact Model of Independent Double Gate MOSFET

M. Reyboz, P. Martin, O. Rozeau, T. Poiroux
cea-leti, FR

DG MOSFET, Independent gates, continuous model, mobility

We have already developed an explicit threshold voltage based compact model of independent double gate MOSFET which well works for gate length between 30 nm and 1µm, or more. However, the mobility was assumed constant. In this paper, we present the model with adapted mobility degradation and velocity saturation models.

Nanotech 2008 Conference Program Abstract