2007 NSTI Nanotechnology Conference and Trade Show - Nanotech 2007 - 10th Annual

Amphibian Systems

Amphibian Systems

Amphibian Systems provides advanced nanolithography exposure systems, instruments, metrology systems, and prototype equipment for research in areas of high resolution imaging, photoresist materials, optical components testing, immersion fluids, and advanced process development. Advances in UV optical lithography will extend toward the nanoscale for application in the fields of semiconductor devices, nano and micro structures, advanced packaging, bio devices, and optical components. Amphibian™ Systems provides the technology needed for the fabrication, measurement, and testing of the nano-scale structures used in these fields.  The Amphibian™ XIS microstepper is a versatile excimer laser exposure tool delivering nanoscale 1D, 2D, and 3D structural imaging for 25-150nm nanolithography at 193 and 248nm wavelengths.

Booth: 1114

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