2007 NSTI Nanotechnology Conference and Trade Show - Nanotech 2007 - 10th Annual

Nanostructured photocatalytic TiO2-xNx thin films prepared by reactive magnetron sputtering

C.-M. Teodorescu and D. Luca
National Institute of Materials Physics, RO

photocatalysts, titana, doping, nanostructured films, manetron sputtering, XANES, EXAFS, XPS, XRD, AFM, spectroscopy

Nitrogen-doped titania films were grown by magnetron sputtering. XPS analysis was used to identify the nitrogen content and the oxygen stoichiometry of the samples. XANES evidenced an increase of the Ti 3d charge density. XRD analysis evidenced mainly rutile phases, with traces of anatase. EXAFS spectroscopy identified a further nanostructured phase, which seems to be the main responsible for lowering the bandgap to around 3 eV and for increased photocatalytic efficiency of the films, as evidenced by UV-Vis. spectroscopy. AFM revealed that the films roughness is reduced.

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