2007 NSTI Nanotechnology Conference and Trade Show - Nanotech 2007 - 10th Annual

Glass nanostructures fabricated by soft thermal nanoimprint

C. Peroz, V. Goletto, M. Foresti, C. Heitz, L. Le Gratiet, E. Barthel and E. Sondergard
Laboratoire mixte CNRS/Saint-Gobain, FR

nanoimprint, sol-gel

Sol-gel chemistry is very versatile and structuring sol-gel materials will allow a fine tuning of chemistry, electromagnetic, optical and mechanical properties. We explore the possibilities to combine sol-gel chemistry to large scale patterning at low cost and high throughput. We demonstrate here the feasibility to fabricate organic-inorganic silica patterns over large areas with a resolution lower than 150nm by soft thermal nanoimprint lithography.

Back to Program

Sessions Sunday Monday Tuesday Wednesday Thursday Authors Keywords

Nanotech 2007 Conference Program Abstract


Names, and logos of other organizations are the property of those organizations and not of NSTI.
This event is not open to the general public and NSTI reserves the right to refuse admission and participation to any individual.