2007 NSTI Nanotechnology Conference and Trade Show - Nanotech 2007 - 10th Annual

MEMS Humidity Structure with Cantilever – Simulation of Behaviour

P. Suchanek and M. Husak
Czech Technical University in Prague, CZ

sensor, humidity, cantileve, MEMS, simulation, design, polymers

The aim of this paper is to report the design of the simple polymers structure humidity sensors and its mechanical and piezorezistive simulation in CoventorWare. Acquired simulation data gets a primary image about sizes bend and surface strain on micro-cantilever which forms sensing part of sensor. For precise simulation of micro-electro-mechanic systems (MEMS) is used integrated set of tools in programme CoventorWare. The primary part of structure sensor is micro-cantilever made of thin silicon wafer which has a rectangular shape. The gas humidity reacts with hygroscopic polymer deposited on the surface of micro-cantilever. Humidity creates stress in micro-cantilever. The best way of scanning bend on micro-cantilever is using resistive strain gauge connected into Wheaston bridge, which is located in the place with the biggest surface strain because of the biggest change resistivity. CoventorWare software tools have been used for simulation and modeling of sensor properties. With this structure we did mechanical and piezo-resistive simulation in programme CoventorWare. This simulation gave us information about size of micro-cantilever bend and size of surface straining on the micro-cantilever surface and resistivity changes in resistive strain gauges. A new approach to structure simulation and model creation was used. New structure arrangement of humidity sensor was used.

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