2007 NSTI Nanotechnology Conference and Trade Show - Nanotech 2007 - 10th Annual

Embeddable Low-Voltage Micropump using Electroosmosis of the Second Kind

T. Heldal, T. Volden, J. Auerswald and H. Knapp
IQ Micro Inc., CH

micropump, electroosmosis of the second kind, EO2, low-voltage, ac, microfabrication

A low-voltage micropump with no moving parts and based on standard MEMS fabrication techniques has been developed. High pumping rate is achieved by using electroosmosis of the second kind (EO2). The pump has been characterized by pumping a variety of liquids, including de-ionized water, phosphate buffer saline (PBS), and aqueous solutions of sugars and alcohols, with pumping speeds of hundreds of µm/s. The small power/voltage requirements and dimensions make the pump suitable for portable, embedded and implantable devices. The pump is situated inside the flow channel and can therefore be directly integrated in high-density microfluidic networks.

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