2007 NSTI Nanotechnology Conference and Trade Show - Nanotech 2007 - 10th Annual

A semi-analytical model for calculating touch-point pressure and pull-in voltage for clamped diaphragms with residual stress

A. Sharma and P.J. George
University, IN

pull-in voltage, touchpoint pressure

A closed form model for calculating touchpoint pressure and pull-in voltage is proposed for a clamped square diaphragm under the influence of residual stress. The governing differential equation is solved to get the closed form equations for deflection in terms of applied voltage and pressure. This in turn gives the expression for pull-in voltage and touch-point pressure. The distinct features of the model are generalised expression for pull-in voltage, which is valid for air-gap as well as for intevening layer of dielectric on the fixed electrode, secondly the deflection of diaphragm with pressure is constarined by the gap. The results are in agreement with experimental as well as simulated results

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