2007 NSTI Nanotechnology Conference and Trade Show - Nanotech 2007 - 10th Annual

Characterization and Optimization Design of the Polymer-based Capacitive Micro-arrayed Ultrasonic Transducer

D.Y. Chiou, M.Y. Chen, M.W. Chang and T.M. Deng
RFID Technology Center/Industrial Technology Research Institute (RTC/ITRI), TW

polymer-based, ultrasonic transducer, finite element method, genetic algorithm

The polymer-based capacitive micro-arrayed ultrasonic transducer (P-CMUT) have been shown to be a more attractive alternative to conventional CMUT in terms of “flexibility” that can be applied in many areas, ranging from consumer electronics to medical diagnosis-imaging system. Two topics, characterization and optimization design of the P-CMUT, will be raised and discussed in this paper. First, characterization studies of the P-CMUT using the finite element method (FEM) are reported. The FEM model was created using the APDL (ANSYS parametric design language) programming technique. The ANSYS Multi-fieldTM solver with sequential approach and the physics environment are used for the solution of the electrostatic-structural coupled-field problem. Both the numerical and experimental results were in good agreement. The studies of influences on each parameter defined in the analysis model are also given. To overcome some problems of contradiction, an integrated multi-objective design approach was proposed to optimize the geometric parameters or material properties of the P-CMUT. The optimization search routine conducted using the genetic algorithm (GA) is connected with the ANSYS model to obtain the best design variable using multi-objective functions. It is concluded that the proposed approach provides another simple, efficient, and versatile numerical tool for multi-objective design and optimization.

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