2007 NSTI Nanotechnology Conference and Trade Show - Nanotech 2007 - 10th Annual

Analysis of an Ink Ejection Failure on a MEMS Micro-Injector Printing Head

I-Y Lee, T-P Hsu, F-C Tseng, H-K Tang and G-D Lin
BenQ Corporation, TW

inkject, MEMS, print head, reliability

In this paper, a stress model is proposed and this model well explains the stress induced failure mechanism of this MEMS micro-injector. An effective solution and optimize design to enhance the robustness of ink chamber design in a MEMS micro-injector is also demonstrated to achieve MEMS printing head production yield over 99%.

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Nanotech 2007 Conference Program Abstract


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