2007 NSTI Nanotechnology Conference and Trade Show - Nanotech 2007 - 10th Annual

Fabrication of Cu-encapsulated Carbon Nanotube Inductors

B.C. Lee, J.O. Lee, Y.-K. Choi and J.-B. Yoon
Korea Institute of Science and Technology(KIST), KR

CNT, RF-MEMS, Inductor, Interconnects

In this works, we developed a top-down fabrication method to pattern and form carbon nanotube(CNT) interconnects with Cu encapsulation. Using this method, we fabricated spiral Cu-encapsulated CNT inductors for RF ICs and investigated the inductance of 0.55nH and quality(Q-) factor of 66 at 8.5GHz.

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Sessions Sunday Monday Tuesday Wednesday Thursday Authors Keywords

Nanotech 2007 Conference Program Abstract


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