2007 NSTI Nanotechnology Conference and Trade Show - Nanotech 2007 - 10th Annual

Reduced-order modelling of the Reynolds equation for flexible structures

A. Missoffe, J. Juillard and D. Aubry

reduced-order modelling, squeeze-film damping, large displacements, modal projection techniques

A reduced-order modelling technique for the Reynolds equation - which governs squeeze-film damping in MEMS structures - is presented in this paper. It is valid for flexible structures and large displacements, the only hypothesis made being small pressure variations. In order to obtain this reduced-order model, the Reynolds equation is transformed through a change of variables so that the spatial differential operator no longer depends on time. A reduced-order model of this transformed equation can then be obtained by projection on the eigenmodes of the spatial operator, in this case the Laplacian. This is clearly an advantage compared to other existing methods and results in smaller construction costs.

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