2007 NSTI Nanotechnology Conference and Trade Show - Nanotech 2007 - 10th Annual

Part-per-Quadrillion (PPQ) Analysis of UltraPure Deionized Water For Semiconductor Fabs

D. Bollinger, H. Gotts
Balazs Analytical Services, US

ultrapure water, ppq, ITRS, ppt, metals, sampling, analytical

The ITRS has specified 1ppt levels for critical metals in UPW through 2007, followed by 0.5ppt (500ppq) beginning in 2008. This presentation will focus on the challenges of sample collection, shipping/transport, and analysis at these levels. PPQ detection is similar to finding 1 mm^3 in the entire volume of the empire state building, or in relation to the distance to the sun (93 million miles) about 0.1mm!

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Nanotech 2007 Conference Program Abstract


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