2007 NSTI Nanotechnology Conference and Trade Show - Nanotech 2007 - 10th Annual

Surface Molecular Contamination: New Contamination Issues and New Problems in the Fab

S. Anderson
Balazs Analytical Services, US

semiconductor, airborne molecular contamination, surface molecular contamination, cleanroom, yield enhancement, ITRS

Surface Molecular Contamination (SMC), specifically from organics (SMOrgs) are a problem for semiconductor manufacturing yields and containation management. The ITRS has outlined detection limits at 0.2ng/cm^2. The presentation will focus on contamination sources (there are many unexpected sources) and analysis methods to identify and remove contributors. Actual case study incidents will be reviewed and ommunicated to the attendees.

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Sessions Sunday Monday Tuesday Wednesday Thursday Authors Keywords

Nanotech 2007 Conference Program Abstract


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