2007 NSTI Nanotechnology Conference and Trade Show - Nanotech 2007 - 10th Annual

The MINATEC Nanoscale Characterization Centre: Comprehensive and complementary analysis tools for nanoelectronics

F. Rieutord
Center for Atomic Energy - Grenoble, FR

Minatec Nanocharacterization Center, characterization tools, infrastructure

The Minatec Nanocharacterization Center hosts a series of characterization tools from and for basic and applied research. Direct space imaging techniques based on electron microscopy are available, with high resolution Transmission or Scanning Electron Microscopes. State-of-the-art developments to add chemical, magnetic, electric or stress sensitivity to the structure information are available or under development. Reciprocal space techniques based on scattering benefit from the presence nearby of large facilities such as the European Synchrotron. Various techniques have been developed to adapt the techniques to nano-scale samples. For example, the center has developed a white beam microdiffraction setup that allows a mapping of orientation and strain in submicron polycristalline materials. Additional techniques are available such as Medium-Energy Ion scattering, X-ray photoelectron spectroscopy and mechanical characterization tools. Benefits from combined complementary technologies in such European scale plateform will be illustrated, aiming to lift technological barriers in nanoscience and microelectronics.

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Sessions Sunday Monday Tuesday Wednesday Thursday Authors Keywords

Nanotech 2007 Conference Program Abstract


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