2007 NSTI Nanotechnology Conference and Trade Show - Nanotech 2007 - 10th Annual

Transient Analysis of Snap-through Behavior of a MEMS Optical Switch

Y-Y Huang and Y-J Yang
National Taiwan University, TW

bi-stable mechanism, transient, snap-through

In this work, we present the study of the transient behaviors of the bi-stable mechanism used for a MEMS optical switch. The major part of the bi-stable mechanism consists of two constrained curved structures (the double-curved beam). As the applied force exceeds a critical value, the double-curved beam snap-through to the other stable state. We use the finite element method (FEM) to simulate both the static and transient snap-through behaviors of the bi-stable mechanism. Also, the simulated results will be compared with the measured results to study the influence of post-snap-through dynamics on the optical performance of the optical switch.

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