2007 NSTI Nanotechnology Conference and Trade Show - Nanotech 2007 - 10th Annual

In-Plane Transduction of Nanomechanical Microcantilever Motion To Enable Sensor Arrays

G.P. Nordin, S. Kim, J. Noh and Y. Qian
Brigham Young University, US

microcantilever sensors, photonic sensors

We have recently introduced a new microcantilever transduction mechanism that is designed to scale to large arrays on a single chip while maintaining a very compact form factor and high sensitivity. It is based on an in-plane photonic approach that uses differential optical detection. In this paper we discuss our new approach and experimental demonstration of its fundamental elements.

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Nanotech 2007 Conference Program Abstract


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